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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2007-12-14
13:30
Nara Nara Institute Science and Technology In-situ Measurement of Temperature Variation in Si wafer During Millisecond Rapid Thermal Annealing
Hirokazu Furukawa, Seiichiro Higashi, Tatsuya Okada, Hirotaka Kaku, Hideki Murakami, Seiichi Miyazaki (Hiroshima Univ.) SDM2007-228
In-situ measurement technique of temperature profile in Si wafer during millisecond rapid thermal annealing has been dev... [more] SDM2007-228
pp.27-29
MBE 2006-12-05
15:10
Aichi Toyohashi University of Technology Medical equipment information controlled by RFID
Takeshi Aikawa, Toshitsugu Sugawara, Kazuyuki Kimura, Junji Arisawa (HIT), Hirokazu Furukawa (Teine Keijinkai Hospital)
 [more] MBE2006-92
pp.33-35
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