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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2016-07-23
10:00
Ehime   Material conversion by heat treatment after the growth of GaAs nanowires
Kohei Nishioka, Fumitaro Ishikawa (Ehime Univ.) CPM2016-28
 [more] CPM2016-28
pp.19-20
ED, LQE, CPM 2012-11-30
16:25
Osaka Osaka City University Study on inductively-coupled-plasma-dry-etching-mask for AlGaAs photonic crystal fabrication
Yuji Togano, Yuta Kitabayashi, Fumitaro Ishikawa, Masahiko Kondow (Osaka Univ.) ED2012-90 CPM2012-147 LQE2012-118
We investigate inductively coupled plasma etching mask of Al-rich AlGaAs for photonic crystal (PC) fabrication. This stu... [more] ED2012-90 CPM2012-147 LQE2012-118
pp.117-120
ED 2011-07-29
16:35
Niigata Multimedia system center, Nagaoka Univ. of Tech. Inductively coupled plasma etching of Al-rich AlGaAs for Photonic Crystal Fabrication
Yuta Kitabayashi, Masaya Mochizuki, Fumitaro Ishikawa, Masahiko Kondow (Osaka Univ.) ED2011-44
We investigate inductively coupled plasma deep dry etching of Al$_{0.8}$Ga$_{0.2}$As for photonic crystal(PC)fabrication... [more] ED2011-44
pp.35-39
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