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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
ICD, SDM |
2005-08-19 11:35 |
Hokkaido |
HAKODATE KOKUSAI HOTEL |
Gate work-function modulation in SiON/poly-Si gate stacks, and its impact on low power devices
-- Advantage of sub-monolayer Hf at SiON/poly-Si interface -- Jiro Yugami (Renesas), Yasuhiro Shimamoto (Hitachi), Masao Inoue, Masaharu Mizutani, Takashi Hayashi, Katsuya Shiga, Fumiko Fujita, Jyunichi Tuchimoto, Yoshikazu Ohno, Masahiro Yoneda (Renesas) |
Gate work-function (WF) is controlled by incorporating sub-monolayer Hf at SiON/poly-Si interface. This technique provid... [more] |
SDM2005-149 ICD2005-88 pp.37-42 |
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