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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
EMD |
2013-10-18 13:30 |
Kanagawa |
NTT Atsugi Research and Development Center |
Electrical and Mechanical Characteristics of ECR-Sputtered Carbon Thin Films Deposited on Various Silicon Substrates Hiromi Uchiyamada, Tatsuo Ooisi, Ryuto Mori, Daiki Takahasi, Kentaro Ooisi, Shigeru Umemura (Chiba Inst. of Tech.), Shigeru Hirono (MES AFTY), Tomoyuki Kamata, Osamu Niwa (AIST) EMD2013-70 |
[more] |
EMD2013-70 pp.1-4 |
EMD |
2009-12-18 14:30 |
Chiba |
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Tribological Characteristics of ECR-Sputtered Fluorocarbon Thin Films Manabu Suzuki, Tomoyuki Kamata, Yusuke Tomine, Shun Hiruma, Shigeru Umemura (Chiba Inst. of Tech.), Shigeru Hirono (MES AFTY), Hidekazu Tohara, Hujio Okino, Yoshiyuki Hattori (Shinshu Univ.), Osamu Niwa (AIST), Diao Dongfeng (Xi'an Jiaotong Univ.) EMD2009-109 |
Fluorine-containing carbon thin films with low resistivity and high wear durability were synthesized by electron-cyclotr... [more] |
EMD2009-109 pp.17-20 |
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