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All Technical Committee Conferences (Searched in: All Years)
| Committee | Date Time | Place | Paper Title / Authors | Abstract | Paper # | |
| SDM, EID | 2014-12-12 15:45 |
Kyoto | Kyoto University | Porous Silicon 3D micro structure formation by strain-induced self-rolling by porosity control Keita Ishiguro, Masaki Denokami, Kanna Aoki, Minoru Fujii (Kobe Univ.)  EID2014-31 SDM2014-126 |
Silicon (Si) is not only the basis of electronic devices, but also established as a basic material of various devices, e... [more] | EID2014-31 SDM2014-126 pp.95-98 |
| EMD, LQE, OPE, CPM, R | 2014-08-21 16:20 |
Hokkaido | Otaru Economy Center | Quick control of the vibration amplitude in high-Q MEMS resonators Hajime Okamoto, Imran Mahboob, Koji Onomitsu, Hiroshi Yamaguchi (NTT) R2014-33 EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 |
High-Q MEMS resonators have a strong advantage in their applications, e.g., highly precise sensors and low power consump... [more] | R2014-33 EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 pp.55-58 |
| ED | 2014-07-10 14:00 |
Aichi | Toyohashi Univ. of Tech. VBL | [Invited Talk]
Miniaturized Vital Sensing Nodes Kazusuke Maenaka (Univ. of Hyogo) ED2014-45 |
This paper deals with miniaturized vital sensing nodes for keeping human health. The sensing node can be patched directl... [more] | ED2014-45 pp.1-6 |
| ED | 2014-07-11 11:15 |
Aichi | Toyohashi Univ. of Tech. VBL | Estimation of parylene-C diaphragm deformation induced by molecular adsorption on a Fabry-Perot interferometric biosensor Yoshihiro Masuya, Kazuhiro Takahashi, Ryo Ozawa, Makoto Ishida, Kazuaki Sawada (Toyohashi Univ.of Tech) ED2014-52 |
We have recently developed a surface stress sensor based on a MEMS Fabry-Perot interferometer integrated with a photodio... [more] | ED2014-52 pp.39-43 |
| PRMU, MI, IE, SIP | 2014-05-23 11:10 |
Aichi | [Special Talk]
Wearable Healthcare
-- MEMS Sensing Technology and Its Applications -- Kazusuke Maenaka (Univ. of Hyogo) SIP2014-17 IE2014-17 PRMU2014-17 MI2014-17 |
Currently, wearable healthcare devices are in the limelight because many countries are in aged society. Wearable healthc... [more] | SIP2014-17 IE2014-17 PRMU2014-17 MI2014-17 pp.91-96 |
|
| ASN | 2013-11-28 14:10 |
Tokyo | Kikai-Shinko-Kaikan Bldg. | [Invited Talk]
Wireless Vibration Sensor Networks for Safe and Comfotable Urban Environment Takuji Hamamoto (Tokyo City Univ.) ASN2013-101 |
Urban vibrations may be divided into ordinary and extraordinary ones. Ordinal vibrations are generated by a variety of e... [more] | ASN2013-101 pp.55-60 |
| CQ | 2013-01-25 14:10 |
Tokyo | Kikai-Shinko-Kaikan Bldg. | [Invited Lecture]
Odor and Taste Evaluation using Electronic Nose and Electronic Tongue Koichi Yoshida (Alpha MOS) CQ2012-79 |
Electronic Nose (E-Nose) and Electronic Tongue (E-Tongue) that Alpha MOS has developed combine highly sensitive Gas or L... [more] | CQ2012-79 pp.33-38 |
| ED, SDM, CPM | 2012-05-17 15:30 |
Aichi | VBL, Toyohashi Univ. of Technol. | A Surface-stress Sensor Based on a MEMS Fabry-Perot Interferometer for Label-free Protein Detection Kazuhiro Takahashi, Hiroki Oyama, Nobuo Misawa, Koichi Okumura, Makoto Ishida, Kazuaki Sawada (Toyohashi Tech.) ED2012-22 CPM2012-6 SDM2012-24 |
We have newly developed a label-free protein sensor based on a MEMS Fabry-Perot interferometer integrated with a photodi... [more] | ED2012-22 CPM2012-6 SDM2012-24 pp.25-28 |
| VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM (Joint) [detail] |
2011-11-29 13:50 |
Miyazaki | NewWelCity Miyazaki | [Invited Talk]
Integrated CMOS-MEMS Technology and Its Applications Hiroki Morimura, Toshishige Shimamura, Kei Kuwabara, Kazuyoshi Ono (NTT), Katsuyuki Machida (NTT-AT) CPM2011-158 ICD2011-90 |
The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated compleme... [more] | CPM2011-158 ICD2011-90 pp.47-52 |
| SDM | 2011-11-10 10:05 |
Tokyo | Kikai-Shinko-Kaikan Bldg. | [Invited Talk]
Equivalent circuit models for MEMS sensors and actuators based on electrical circuit simulator Hiroshi Toshiyoshi (Univ. of Tokyo) SDM2011-115 |
This paper presents an LSI-designer friendly and handy simulation technique for integrated MEMS (microelectromechanical ... [more] | SDM2011-115 pp.1-6 |
| OFT | 2011-10-21 09:25 |
Nagano | High-Performance FBG sensor monitor Takanori Saitoh, Kenichi Nakamura, Masaru Koshihara, Hiroshi Furukawa (Anritsu Devices) OFT2011-42 |
We developed a new FBG sensor monitor using a single mode wavelength swept light source which can wavelength sweep with ... [more] | OFT2011-42 pp.59-64 |
|
| SDM, ICD | 2011-08-25 12:50 |
Toyama | Toyama kenminkaikan | [Invited Talk]
Sub-nanowatt Circuit Techniques Enabling Wireless-sensor-node Operation with an Energy Harvester Mamoru Ugajin, Toshishige Shimamura, Hiroki Morimura, Shin'ichiro Mutoh, Mitsuru Harada (NTT) SDM2011-77 ICD2011-45 |
Sub-nanowatt circuit techniques for wireless sensor-node operation with a nonowatt energy harvester are presented. Issue... [more] | SDM2011-77 ICD2011-45 pp.35-40 |
| US | 2011-02-21 14:25 |
Ibaraki | Implementation of a Realtime Ultrasonic Imaging System Using a Planar MEMS Sensor Array and a Fast Beamformer Algorithm Yasushige Maeda (SOKENDAI), Masanori Sugimoto (U. Tokyo), Hiromichi Hashizume (NII) US2010-120 |
We developed an ultrasonic imaging system, which consists of a sensor array board with 128 ultrasonic MEMS microphones m... [more] | US2010-120 pp.45-49 |
|
| ICD, SDM | 2010-08-26 14:50 |
Hokkaido | Sapporo Center for Gender Equality | [Invited Talk]
MEMS/BEANS-Enabled Green Technology Norihisa Miki (Keio Univ./BEANS Project) SDM2010-135 ICD2010-50 |
This paper discusses the overview of green technology enabled by MEMS and BEANS, in particular, highlighting silicon-bas... [more] | SDM2010-135 ICD2010-50 pp.59-64 |
| ICD, SDM | 2010-08-26 16:30 |
Hokkaido | Sapporo Center for Gender Equality | [Invited Talk]
A Wide-Area Sensor Network with Fiber Optic Power Supply Yosuke Tanaka, Takashi Kurokawa (Tokyo Univ. of A & T) SDM2010-137 ICD2010-52 |
This paper demonstrates a wide-area sensor network whose sensor nodes are driven by supplied laser power. The sensor nod... [more] | SDM2010-137 ICD2010-52 pp.71-76 |
| ICD, ITE-IST | 2009-10-01 15:20 |
Tokyo | CIC Tokyo (Tamachi) | [Invited Talk]
Integrated MEMS and Biomedical MEMS Masayoshi Esashi (Tohoku Univ.) ICD2009-44 |
Integrated MEMS have been effectively applied for capacitive sensors by integrating capacitance detection circuits and f... [more] | ICD2009-44 pp.57-62 |
| ED | 2009-07-31 10:00 |
Osaka | Osaka Univ. Icho-Kaikan | [Keynote Address]
Prospect of Integrated MEMS Technology for Integration with Diverse Functionalities Kazuya Masu (Tokyo Ins. Tech.) ED2009-109 |
In the CMOS evolution, there are two technology directions; (1)Miniaturization or ” More Moore”, and (2) Integration wi... [more] | ED2009-109 pp.39-40 |
| ED | 2009-07-31 13:20 |
Osaka | Osaka Univ. Icho-Kaikan | Micromachined Methane Sensor Based on Palladium Catalytic Thin Layer/Tin Oxide Thick Film
-- Improvement in Thermal Shock Resistance by Examining its Design -- Tadashi Takada, Naganori Dougami, Yoshinori Nakataya (New Cosmos Electric Co.,Ltd.) ED2009-113 |
Thermal shock resistance of a micromachined gas sensor that has a suspended type structure and a sintered SnO2 thick fil... [more] | ED2009-113 pp.57-61 |
| NLP | 2009-03-10 10:25 |
Kyoto | Derivation of Dynamical Equations of Coupled MEMS Gyroscopes Suketu Naik, Takashi Hikihara (Kyoto Univ.) NLP2008-152 |
Vibratory gyroscopes are utilized to detect angles of rotation or rates of angular rotation. A typical gyroscope include... [more] | NLP2008-152 pp.7-12 |
|
| USN | 2008-05-22 15:30 |
Tokyo | Kikai-Shinko-Kaikan Bldg. (Tokyo) | [Invited Talk]
Ubiquitous sensing in MEMS technology
-- Sensors in MEMS technology -- Kazusuke Maenaka (University of Hyogo) USN2008-10 |
For effective ubiquitous sensing system, it is required that the sensors should be miniaturized, low-cost and mass-prod... [more] | USN2008-10 pp.55-60 |
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