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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2013-12-13
16:20		 Nara NAIST Fabrication of Ferroelectric Microstructures by Proton Beam Irradiation
Kazuki Watanabe, Masaki Yamaguchi, Hiroyuki Nishikawa (Shibaura Inst. of Tech.) SDM2013-130		 In this study, we performed examination to form a thick film with the thing which added Polyvinylpyrrolidone (PVP), in t... [more] SDM2013-130
pp.85-89
ED 2009-07-31
10:40		 Osaka Osaka Univ. Icho-Kaikan Fabrication of Multi-axis Tactile Sensor for Future Robots by Using Microelectromechanical Systems
Masayuki Sohgawa, Takeshi Kanashima (Osaka Univ.), Kaoru Yamashita, Minoru Noda (Kyoto Inst. Tech.), Masanori Okuyama (Osaka Univ.), Haruo Noma (ATR) ED2009-110		 Tactile array sensors with macro-cantilevers embedded in elastomer which can detect both normal and shear stresses have ... [more] ED2009-110
pp.41-46
MW, ED 2005-11-17
09:50		 Saga   RF characteristics of a compact cantilever type MEMS switch
Tamotsu Nishino, Masatake Hangai, Shinichi Izuo, , Yukihisa Yoshida, Moriyasu Miyazaki (Mitsubishi Electric Corp.) 		A compact RF-MEMS switch was developed by using micromachining process with plated gold and sacrificial material of nick... [more] ED2005-159 MW2005-114
pp.11-14
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