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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2009-12-04
13:50		 Nara NAIST Investigation of LTPS TFT flash memory using crystallized 3-dimentonal substrate by green laser irradiation
Kazunori Ichikawa, Masahiro Matsue, Hiroshi Akamatsu (Kobe City Coll. of Tech), Yukiharu Uraoka (NAIST) SDM2009-161		 Low temperature poly-Si TFT（LTPS TFT） has been widely investigated as a promising technique for a system on panel (SOP).... [more] SDM2009-161
pp.55-58
SDM 2009-12-04
15:30		 Nara NAIST Crystallization of a-Si Film via Quasi-Nuclei Formed by Laser Plasma Soft X-Ray Irradiation
Sinya Isoda, Naoto Matsuo, Sho Amano, Akira Heya, Shuji Miyamoto, Takayasu Mochizuki (Univ. of Hyogo.) SDM2009-165		 A-Si film irradiated Laser Plasma soft X-ray (LPX) was analyzed by Raman spectrometry, spectroscopic ellipsometry, and e... [more] SDM2009-165
pp.73-77
SDM 2008-10-09
14:30		 Miyagi Tohoku Univ. Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol
Masayuki Numata, Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2008-151		 CW laser crystallization of amorphous silicon films is a promising method to realize thin film transistor with high per... [more] SDM2008-151
pp.13-16
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