Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
EA, US (Joint) |
2023-12-22 13:00 |
Fukuoka |
|
[Poster Presentation]
Double mode type BAW filter based on ScAlN multilayers SMR using stacked electrodes Saneyuki Shibata, Takahiko Yanagitani (Waseda Univ.) US2023-56 |
Surface acoustic wave (SAW) filters, which use surface acoustic waves, and bulk acoustic wave (BAW) filters, which use b... [more] |
US2023-56 pp.1-6 |
EA, US (Joint) |
2023-12-22 13:00 |
Fukuoka |
|
[Poster Presentation]
c-Axis tilted epitaxial ScAlN self-supporting thin film resonators with epitaxial ZnO sacrificial layer Shiori Kobayashi, Takahiko Yanagitani (Waseda Univ.) US2023-59 |
Piezoelectric thin films with high shear mode electromechanical coupling coefficient k´352 are attractive to improve S/N... [more] |
US2023-59 pp.18-23 |
US |
2023-11-27 16:10 |
Shizuoka |
Shizuoka University |
30-layer polarization inversion HBAR for acoustic separation of piezoelectric layer and substrate Kazutaka Shiraiwa, Takahiko Yanagitani (Waseda univ) US2023-54 |
There are two types of BAW resonators, FBAR (film bulk acoustic resonator: free standing structure) and SMR (Solidly mou... [more] |
US2023-54 pp.61-66 |
US |
2023-11-27 16:35 |
Shizuoka |
Shizuoka University |
SMR based on epitaxial ScAlN piezoelectric thin films/epitaxial acoustic Bragg reflector Satoshi Tokai, Takahiko Yanagitani (Waseda Univ.) US2023-55 |
Single crystalline piezoelectric thin films possess higher power durability and Q factor than polycrystalline ones. Howe... [more] |
US2023-55 pp.67-72 |
MIKA (3rd) |
2023-10-11 14:30 |
Okinawa |
Okinawa Jichikaikan (Primary: On-site, Secondary: Online) |
[Poster Presentation]
High power characteristics of nitride multilayered piezoelectric thin films for RF filters Saneyuki Shibata, Takahiko Yanagitani (Waseda Univ.) |
In the 5th generation mobile communication systems (5G), which are currently in widespread use, and in the 6G and beyond... [more] |
|
MIKA (3rd) |
2023-10-11 14:30 |
Okinawa |
Okinawa Jichikaikan (Primary: On-site, Secondary: Online) |
[Poster Presentation]
Multilayer piezoelectric thin-film resonators aimed at RF filters for base stations Kazutaka Shiraiwa, Takahiko Yanagitani (Waseda Univ.) |
Currently, the demand for wireless communications at high-frequency such as 5G and 6G is increasing. Piezoelectric mater... [more] |
|
EST, MW, EMT, OPE, MWPTHz, IEE-EMT [detail] |
2023-07-20 15:15 |
Hokkaido |
Muroran Institute of Technology (Primary: On-site, Secondary: Online) |
Elastic constant tensors cijE of (0001) ScxAl1-xN thin films (x=0-0.63) measured by Brillouin light scattering method Hiroki Uchida (Waseda Univ.), Hayato Ichihashi (Doshisya Univ.), Masashi Suzuki (Yamanashi Univ.), Shinji Takayanagi, Mami Matsukawa (Doshisya Univ.), Takahiko Yanagitani (Waseda Univ.) EMT2023-20 MW2023-38 OPE2023-20 EST2023-20 MWPTHz2023-16 |
Large piezoelectricity and high Q factor in ScAlN film is attractive for RF filter applications. . Elastic constant tens... [more] |
EMT2023-20 MW2023-38 OPE2023-20 EST2023-20 MWPTHz2023-16 pp.61-66 |
EA, US (Joint) |
2022-12-22 16:50 |
Hiroshima |
Satellite Campus Hiroshima |
[Poster Presentation]
Q factor extraction of ScAlN, ZnO, PZT piezoelectric films without etching substrate Yuki Shimizu (Waseda Univ.), Takahiko Yanagitani (Waseda Univ./JST) US2022-61 |
In recent years, sharp passband is required for RF filters to prevent interference between neighboring bands. The sharpn... [more] |
US2022-61 pp.56-61 |
EA, US (Joint) |
2022-12-22 16:50 |
Hiroshima |
Satellite Campus Hiroshima |
[Poster Presentation]
Characteristics of YbGaN and YbAlN epitaxial thin film resonators Song Li, Junjun Jia, Takahiko Yanagitani (Waseda Univ.) US2022-64 |
Bulk acoustic wave (BAW) resonators based on AlN or GaN piezoelectric thin films are suitable for GHz frequency filters ... [more] |
US2022-64 pp.74-79 |
US |
2020-11-05 13:00 |
Aichi |
|
Effect of negative ion bombardment increased in low-pressure sputtering deposition on crystallinity and piezoelectric property of ScAlN thin film Takumi Tominaga, Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.) US2020-43 |
Since the ScAlN film has much higher piezoelectric response than the AlN film, it is expected to be applied to BAW devic... [more] |
US2020-43 pp.1-6 |
US |
2020-09-28 14:25 |
Online |
Online |
c-Axis tilted ScAlN film piezoelectric transformer in the UHF range Sarina Kinoshita (Waseda Univ./ZAIKEN), Takahiko Yanagitani (Waseda Univ./ZAIKEN/JST CREST) US2020-35 |
Battery-less sensors require energy harvesting from the ambient environment. RF-DC conversion with a rectifying antenna ... [more] |
US2020-35 pp.45-50 |
US |
2020-09-28 14:50 |
Online |
Online |
Effect of negative ions generated from ScAl sputtering targets on kt2 and crystal orientation of ScAlN thin films Rui Kihara (Waseda Univ.), Shinji Takayanagi (Doshisha Univ.), Takahiko Yanagitani (Waseda Univ.) US2020-36 |
ScAlN thin films with large electromechanical coupling coefficient have been attracting attention for the application to... [more] |
US2020-36 pp.51-56 |
US |
2019-07-29 14:20 |
Hokkaido |
|
Liquid viscoelasticity characterization by the complex reflection coefficient using quasi-shear mode c-axis tilted ScAlN thin film transducers Ryosuke Amano, Yui Yamakawa (Waseda Univ./ZAIKEN), Takahiko Yanagitani (Waseda Univ./ZAIKEN/JST-PREST) US2019-31 |
In the complex reflection measurement of liquid/solid interface, the low angle incidence of shear horizontal (SH) wave t... [more] |
US2019-31 pp.19-23 |
US |
2018-10-04 12:40 |
Miyagi |
|
Evaluation of fluid viscosity in the ultrahigh frequency range using quasi-shear mode c-axis tilted ScAlN thin film resonators Yui Yamakawa, Takumi Soutome, Rei Karasawa, Takahiko Yanagitani (Waseda Univ.) US2018-53 |
In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required t... [more] |
US2018-53 pp.25-29 |
US |
2015-10-09 15:50 |
Ishikawa |
Kanazawa Institute of Technology |
Brillouin scattering measurement of coherent phonons induced by ScAlN piezoelectric thin film Eunhye Cho, Masahiko Kawabe, Shinji Takayanagi (Doshisha Univ.), Masashi Suzuki, Takahiko Yanagitani (Waseda Univ.), Mami Matsukawa (Doshisha Univ.) US2015-63 |
Brillouin scattering spectroscopy allows to investigate a shift frequency of the incident light in GHz range, which occu... [more] |
US2015-63 pp.27-30 |