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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2014-10-16
16:30		 Miyagi Niche, Tohoku Univ. [Invited Talk] Ion Implantation Technologies for Image Sensing Devices
Yoji Kawasaki, Genshu Fuse, Makoto Sano, Emi Ooga, Masazumi Koike, Kazuhiro Watanabe, Michiro Sugitani (SEN Corp.) SDM2014-88		 Some trends of the implantation processing in device fabrication of CMOS image sensors are discussed. Firstly, the varia... [more] SDM2014-88
pp.23-30
SCE 2007-10-17
14:15		 Tokyo Kikai-Shinko-Kaikan Bldg. Optimization in ramp fabrication process for high-Tc ramp-edge Josephson junction
Seiji Adachi, Kaku Igarashi, Kiyokazu Higuchi, Hironori Wakana (SRL), Nobuyuki Iwata, Hiroshi Yamamoto (Nihon Univ.), Keiichi Tanabe (SRL) 		For fabrication of integrated circuits including high-Tc ramp-edge Josephson junctions, the establishment of preparation... [more] SCE2007-21
pp.17-21
OPE, EMT, LQE, PN 2007-01-29
10:45		 Osaka Osaka Univ. Convention Center Three-dimensional fabrication of photoresist using holographic two-photon microfabrication
Hidetomo Takahashi, Maki Nishitani, Yoshio Hayasaki (Tokushima Univ.) PN2006-50 OPE2006-132 LQE2006-121		 Holographic two-photon microfabrication method performs high-speed parallel processing inside photoresist using a comput... [more] PN2006-50 OPE2006-132 LQE2006-121
pp.19-24
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