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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2017-11-09
13:30		 Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Talk] Impurity Diffusion Modeling in SiC
Masashi Uematsu (Keio Univ.) SDM2017-64		 SiC is an attractive material for the application of high-power electronic devices. In this article, the current status ... [more] SDM2017-64
pp.15-20
SDM 2015-11-05
10:00		 Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Talk] Current Status of Impurity Diffusion Modeling in Semiconductors
Masashi Uematsu (Keio Univ.) SDM2015-84		 With the scaledown of CMOS devices, it is crucial to establish a diffusion model to accurately predict impurity diffusio... [more] SDM2015-84
pp.1-6
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