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Paper #
LQE
,
OPE
2005-06-24
09:40
Tokyo
Kikai-Shinko-Kaikan Bldg.
Fabrication of InP-based semiconductor photonic crystal by HI-based ICP etching
Kengo Nozaki
,
Junichi Hashimoto
,
Toshihide Ide
,
Eiichi Mizuta
,
Masahiro Shiga
,
Toshihiko Baba
(
Yokohama Nat'l Univ.
)
We successfully formed the photonic crystal consisting of airholes with smooth sidewalls and high aspect ratio into GaIn...
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OPE2005-15
LQE2005-14
pp.7-10
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