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Committee Date Time Place Paper Title / Authors Abstract Paper #
R 2007-09-14
10:30
Kochi Kochi Univ. of Technology Material Processing by Microplasma in SEM
Hidenori Ohi, Yasuaki Okazaki, Tomoyoshi Takahashi, Akimitsu Hatta (Kochi Univ. Technol.) R2007-29
It has been demonstrated that microplasma was generated in SEM operated under low vacuum mode using micro-gas nozzle for... [more] R2007-29
pp.1-4
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