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Committee Date Time Place Paper Title / Authors Abstract Paper #
EMD, OPE, LQE, CPM 2010-08-27
09:25
Hokkaido Chitose Arcadia Plaza Fabrication of Low-Electrical-Interference MEMS Mirror Array for Wavelength-selective Switches
Tomomi Sakata, Mitsuo Usui, Shingo Uchiyama, Nobuhiro Shimoyama, Tohru Matsuura (NTT Corp.), Hiromu Ishii (NTT Corp./Toohashi Univ. of Tech.), Fusao Shimokawa (NTT Corp/Kagawa Univ.), Yasuhiro Sato (NTT Corp.) EMD2010-44 CPM2010-60 OPE2010-69 LQE2010-42
This paper describes the fabrication of a MEMS mirror array with low electrical interference in a wavelength-selective s... [more] EMD2010-44 CPM2010-60 OPE2010-69 LQE2010-42
pp.85-88
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