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Committee Date Time Place Paper Title / Authors Abstract Paper #
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM
(Joint) [detail]		 2011-11-29
13:00		 Miyazaki NewWelCity Miyazaki Layout Methodology for Self-Alinged Double Patterning
Chikaaki Kodama, Koichi Nakayama, Toshiya Kotani, Shigeki Nojima, Shoji Mimotogi, Shinji Miyamoto (Toshiba) VLD2011-76 DC2011-52		 We propose a new layout method for the damascene process of
self-aligned double patterning (SADP).
In this method, w... [more]		 VLD2011-76 DC2011-52
pp.141-146
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