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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2013-08-02
09:20
Hokkaido   Development of Substrate Heater System of Cold-Wall Chemical Vapor Deposition Equipment for Improvement of Single-Walled Nanotubes Quality
Yusaku Tsuda, Takumi Sagara, Kenichi Yamakawa, Keisuke Yoshida, Nobuyuki Iwata, Hiroshi Yamamoto (Nihon Univ.) CPM2013-47
We have developed an alcohol catalytic chemical vapor deposition (ACCVD) process in order to fabricate nanoscaled electr... [more] CPM2013-47
pp.39-44
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