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Committee Date Time Place Paper Title / Authors Abstract Paper #
CPM 2007-08-09
16:10		 Yamagata Yamagata Univ. Examination of ITO Thin Films Deposited by Substrate Bias Sputtering(II)
Takeshi Umetsu, Yusuke Nakata, Hidehiko Shimizu, Takeo Maruyama, Haruo Iwano (Niigata Univ.), Yoichi Hoshi (Tokyo Polytechnic Univ.) CPM2007-42		 In order to examine deposition method to crystallize an ITO film at low temperature, deposition of ITO thin films was at... [more] CPM2007-42
pp.33-38
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