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All Technical Committee Conferences (Searched in: All Years)
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Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2017-10-26 09:30 |
Miyagi |
Niche, Tohoku Univ. |
[Invited Talk]
Utilization of Big Data for Innovation in Semiconductor Memory Manufacturing
-- Comprehensive Big-Data-Based Monitoring System for Yield Analysis in Semiconductor Manufacturing -- Hiroshi Akahori (Toshiba Memory), Kouta Nakata, Ryohei Orihara, Yoshiaki Mizuoka, Kentaro Takagi (Toshiba), Kenichi Kadota, Takaharu Nishimura, Yukako Tanaka, Hidetaka Eguchi (Toshiba Memory) SDM2017-55 |
In this work, we focus on yield analysis task where engineers identify the cause of failure from wafer failure map patte... [more] |
SDM2017-55 pp.31-33 |
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