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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2008-08-04 14:00 |
Hokkaido |
Muroran Institute of Technology |
Development of Surface-Wave Plasma Generation Apparatus and Application to Semiconductor Processing Hisashi Fukuda (Muroran Inst. Technol.), Masakazu Furukawa (ARIC) CPM2008-41 |
We have developed a high-density surface-wave plasma apparatus for the application to next generation semiconductor fabr... [more] |
CPM2008-41 pp.1-4 |
CPM |
2008-08-04 15:25 |
Hokkaido |
Muroran Institute of Technology |
Organic Thin Film Transistor with Substituted Polyacetylenes containing Hetero Atoms Tetsuya Imamura, Yasuteru Mawatari, Hisashi Fukuda, Masayoshi Tabata (Muroran Inst. Technol) CPM2008-44 |
Organic thin film transistors (OTFTs) using substituted polyacetylenes which have a helical form were fabricated. Substi... [more] |
CPM2008-44 pp.15-18 |
CPM |
2008-08-04 15:50 |
Hokkaido |
Muroran Institute of Technology |
Poly-3-hexylthiophene Thin Film Formation and Application to Organic Thin Film Transistor Hisashi Fukuda, Katsuhiro Uesugi (Muroran Inst. Technol.) CPM2008-45 |
Regioregular poly-3-hexylthiophene (P3HT) thin films were formed using a spin coating technique. After deposition in a m... [more] |
CPM2008-45 pp.19-22 |
CPM |
2008-08-04 16:15 |
Hokkaido |
Muroran Institute of Technology |
Pentacene Thin Film Formation and Application to Organic Transistor Yoshihiro Tada, Shinya Yamada, Katsuhiro Uesugi, Hisashi Fukuda (Muroran Inst. Technol.) CPM2008-46 |
We have fabricated an organic thin film transistor (OTFT) with an active layer of pentacene thin film evaporated by vacu... [more] |
CPM2008-46 pp.23-26 |
EMD, CPM, LQE, OPE |
2006-08-25 10:05 |
Hokkaido |
Chitose Arcadia Plaza |
Development of Surface Wave Excitation Plasma Generation Apparatus and Application to Semiconductor Processing Haruki Shoji, Hisashi Fukuda, Masakazu Furukawa (Muroran Inst. Tech.) |
[more] |
EMD2006-37 CPM2006-67 OPE2006-79 LQE2006-44 pp.67-70 |
CPM, EMD, OME |
2006-06-30 15:15 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Poly-3-hexylthiophene Thin Film Formation and Application to Organic Thin Film Transistor Hisashi Fukuda, Takashi Kojima, Katsuhiro Uesugi (Muroran Inst. Technol.) |
[more] |
EMD2006-12 CPM2006-36 OME2006-46 pp.39-44 |
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