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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2015-03-02
Tokyo Kikai-Shinko-Kaikan Bldg [Invited Talk] CNT Via Integration with Highly Dense and Selective CNT Growth
Atsunobu Isobayashi, Makoto Wada, Ban Ito, Tatsuro Saito, Daisuke Nishide, T. Ishikura, Masayuki Katagiri, Yuichi Yamazaki, Takashi Matsumoto, Masayuki Kitamura, Masahito Watanabe, Naoshi Sakuma, Akihiro Kajita, Tadashi Sakai (LEAP) SDM2014-167
In this study, a highly selective carbon nanotube (CNT) via process was developed using a sacrificial spin-on carbon (SO... [more] SDM2014-167
ICD, SDM 2012-08-03
Hokkaido Sapporo Center for Gender Equality, Sapporo, Hokkaido [Invited Talk] Nanocarbon Interconnects -- Aiming to replace ultra-fine metal interconnects --
Akihiro Kajita, Makoto Wada, Tatsuro Saito, Masayuki Kitamura, Yuichi Yamazaki, Masayuki Katagiri, Ban Ito, Daisuke Nishide, Takashi Matsumoto, Atsunobu Isobayashi, Mariko Suzuki, Atsuko Sakata, Masahito Watanabe, Naoshi Sakuma, Tadashi Sakai (LEAP) SDM2012-78 ICD2012-46
The width of interconnects has been shrinking toward 10nm in accordance with LSI devices shrinkage. The resistivity of s... [more] SDM2012-78 ICD2012-46
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