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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, OME 2008-04-11
11:25		 Okinawa Okinawa Seinen Kaikan Evaluation of stress and crystallinity of laser crystallization polysilicon thin film using UV/Visible Raman spectroscopy
Yasuto Kakemura, Daisuke Kosemura, Atsushi Ogura (Meiji Univ.), Takashi Noguchi (Univ. of the Ryukyus) SDM2008-6 OME2008-6		 Low temperature polysilicon (LTPS) thin film is a key material for the systems-on-glass achievement. Depth and in-plane ... [more] SDM2008-6 OME2008-6
pp.27-32
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