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ICD, SDM 2010-08-26
15:40		 Hokkaido Sapporo Center for Gender Equality [Invited Talk] Development of MEMS Technologies for Micro Energy Systems
Yuji Suzuki (Univ. of Tokyo.) SDM2010-136 ICD2010-51		 Power MEMS is defined as MEMS device related to energy conversion in micro scale. After the investigation of coin-sized ... [more] SDM2010-136 ICD2010-51
pp.65-69
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