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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2022-02-04 09:05 |
Online |
Online |
[Invited Talk]
Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films using lag-time method Takeshi Momose, Taewoong Kim, Yubin Deng, Momoko Deura (UTokyo), Akira Matsuo, Nobuo Yamaguchi (CANON ANELVA), Yukihiro Shimogaki (UTokyo) SDM2021-74 |
For the development of ultra-thin barrier layers for Cu interconnections in ultra large scale integration, it is essenti... [more] |
SDM2021-74 pp.1-4 |
SDM |
2016-01-22 13:55 |
Tokyo |
Sanjo Conference Hall, The University of Tokyo |
Fabrication of highly reliable Co(W) thin film by physical vapor deposition for next generation ULSI Cu interconnects Taewoong Kim, Kouta Tomita, Takeshi Momose (Univ. of Tokyo), Takaaki Tsunoda, Takayuki Moriwaki (CANON ANELVA), Yukihiro Shimogaki (Univ. of Tokyo) SDM2015-114 |
[more] |
SDM2015-114 pp.25-28 |
LQE, OPE |
2011-06-30 11:10 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Progress of wavelength conversion devices based on compound semiconductor waveguides Tomonori Matsushita, Tae Woong Kim, Takashi Kondo (Tokyo Univ.) OPE2011-19 LQE2011-19 |
AlGaAs waveguiding devices for wavelength conversion in the 1.55~$\mu$m region will be reported. We have fabricated high... [more] |
OPE2011-19 LQE2011-19 pp.21-24 |
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