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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
LQE, OPE |
2013-06-21 10:35 |
Tokyo |
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Silicon photonics devices on 300 mm wafer fabricated by using ArF immersion lithography Tomohiro Kita, Yuichiro Tanushi, Masaki Nara, Syu Hirano (Tohoku Univ.), Munehiro Toyama, Miyoshi Seki, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Akinobu Sugiyama, Eiichi Ishitsuka, Tsukuru Sano, Tsuyoshi Horikawa (AIST), Hirohito Yamada (Tohoku Univ.) OPE2013-7 LQE2013-17 |
We have investigated optical characteristics of Si photonics devices formed on 300 mm SOI wafers by using ArF immersion ... [more] |
OPE2013-7 LQE2013-17 pp.1-5 |
SDM |
2009-10-29 16:45 |
Miyagi |
Tohoku University |
Current Voltage Characteristics of Si-MESFET on SOI Substrate Toshiyuki Abe, Yuichiro Tanushi, Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2009-122 |
We simulate current-voltage characteristics of scaled Si metal semiconductor field effect transistors (MESFETs) and show... [more] |
SDM2009-122 pp.27-30 |
SDM |
2009-10-30 11:30 |
Miyagi |
Tohoku University |
Crystallization of Amorphous Silicon Films on Glass Substrate by Heated Gas Beam Annealing Yuichiro Tanushi, Yosuke Kawano, Shin-Ichiro Kuroki, Koji Kotani (Tohoku Univ), Naomi Mura, Kimihisa Yamakami, Yuji Furumura (Philtech Inc.), Takashi Ito (Tohoku Univ) SDM2009-128 |
For a new novel method to crystallize amorphous silicon films on glass substrate, heated gas beam annealing method is pr... [more] |
SDM2009-128 pp.47-50 |
OPE |
2007-12-14 16:30 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Electric-Field Drive Optical Modulator Using Si Ring Resonator Tomohiro Tokunaga, Yuichiro Tanushi, Yoshiteru Amemiya, Shin Yokoyama (Hiroshima Univ.) |
Multimode Si ring resonators (20um in diameter and resonance wavelength of 1500nm) were fabricated on SOI wafers. The wa... [more] |
OPE2007-143 pp.41-46 |
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