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Conference Papers (Available on Advance Programs) (Sort by: Date Descending)

Committee	Date Time	Place		Paper Title / Authors	Abstract	Paper #
SDM	2016-01-22 11:15	Tokyo	Sanjo Conference Hall, The University of Tokyo	Copper Thin Film Growth using Cu(I) Amidinate Precursor in Supercritical Carbon Dioxide Md Rasadujjaman, Mitsuhiro Watanabe (Univ. Yamanashi), Hiroshi Sudoh, Hideaki Machida (Gas phase growth), Eiichi Kondoh (Univ. Yamanashi) SDM2015-110	[more]	SDM2015-110 pp.9-12
SDM	2016-01-22 11:35	Tokyo	Sanjo Conference Hall, The University of Tokyo	In-situ ellipsometry of Cu surfaces immersed in BTA-H2O2 solutions Tatsuya Kawakami, Eiichi Kondoh, Mitsuhiro Watanabe (University of Yamanashi), Satomi Hamada, Shohei Shima, Hirokuni Hiyama (Ebara Corporation) SDM2015-111	During Cu CMP, Cu surface is oxidized by an oxidizer or a complexiation reagent. To inhibit oxidation, a corrosion inhib... [more]	SDM2015-111 pp.13-15

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