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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
OME |
2022-12-27 11:15 |
Okinawa |
OKINAWAKEN SEINENKAIKAN (Primary: On-site, Secondary: Online) |
ラマン分光分析による電解硫酸中の酸化剤濃度測定の可能性 Emi Shindou (Graduate school, CIT), Tatsuo Nagai (Micro ace), Hidehiko Ohtsu, Yukihiro Sakamoto (CIT) |
[more] |
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OME |
2019-12-26 11:05 |
Okinawa |
Okinawaken Seinenkaikan |
Preparation of diamond electrodes and electrolyzed sulfuric acid technology Emi Shindou (CIT), Tatsuo Nagai (Micro Ace), Yukihiro Sakamoto (CIT) OME2019-50 |
Boron-doped diamond was synthesized with trimethyl borate B(CH3O)3 as boron source using a microwave plasma CVD apparatu... [more] |
OME2019-50 pp.9-12 |
ED |
2008-06-13 16:10 |
Ishikawa |
Kanazawa University |
Study on Deterioration of Resist Removal Efficiency in SPM, and Experimental Proof of Ashingless Resist Removal Using Electrolyzed Sulfuric Acid Solution Tatsuo Nagai, Haruyoshi Yamakawa, Minoru Uchida, Toru Otsu, Norihito Ikemiya (Kurita) ED2008-29 |
It is known that resist removal capability of SPM gradually deteriorates during the stripping process. Theoretical expl... [more] |
ED2008-29 pp.41-46 |
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