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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2020-02-07 09:20 |
Tokyo |
Tokyo University-Hongo |
Formation of passivation layer on Cu and Co surfaces in BTA-H2O2 aqueous solutions Kondoh, Eiichi, Toyama, Mao, Takeuchi, Shota, Jin, Lianhua (Univ. Yamanashi), Ryota Koshino, Hamada, Satomi, Shima, Shohei, Hiyama, Hirokuni (Ebara Corp.) SDM2019-88 |
[more] |
SDM2019-88 pp.1-3 |
SDM |
2016-01-22 11:35 |
Tokyo |
Sanjo Conference Hall, The University of Tokyo |
In-situ ellipsometry of Cu surfaces immersed in BTA-H2O2 solutions Tatsuya Kawakami, Eiichi Kondoh, Mitsuhiro Watanabe (University of Yamanashi), Satomi Hamada, Shohei Shima, Hirokuni Hiyama (Ebara Corporation) SDM2015-111 |
During Cu CMP, Cu surface is oxidized by an oxidizer or a complexiation reagent. To inhibit oxidation, a corrosion inhib... [more] |
SDM2015-111 pp.13-15 |
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