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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2015-03-02 13:35 |
Tokyo |
Kikai-Shinko-Kaikan Bldg |
[Invited Talk]
CNT Via Integration with Highly Dense and Selective CNT Growth Atsunobu Isobayashi, Makoto Wada, Ban Ito, Tatsuro Saito, Daisuke Nishide, T. Ishikura, Masayuki Katagiri, Yuichi Yamazaki, Takashi Matsumoto, Masayuki Kitamura, Masahito Watanabe, Naoshi Sakuma, Akihiro Kajita, Tadashi Sakai (LEAP) SDM2014-167 |
In this study, a highly selective carbon nanotube (CNT) via process was developed using a sacrificial spin-on carbon (SO... [more] |
SDM2014-167 pp.29-32 |
ICD, SDM |
2012-08-03 09:25 |
Hokkaido |
Sapporo Center for Gender Equality, Sapporo, Hokkaido |
[Invited Talk]
Nanocarbon Interconnects
-- Aiming to replace ultra-fine metal interconnects -- Akihiro Kajita, Makoto Wada, Tatsuro Saito, Masayuki Kitamura, Yuichi Yamazaki, Masayuki Katagiri, Ban Ito, Daisuke Nishide, Takashi Matsumoto, Atsunobu Isobayashi, Mariko Suzuki, Atsuko Sakata, Masahito Watanabe, Naoshi Sakuma, Tadashi Sakai (LEAP) SDM2012-78 ICD2012-46 |
The width of interconnects has been shrinking toward 10nm in accordance with LSI devices shrinkage. The resistivity of s... [more] |
SDM2012-78 ICD2012-46 pp.83-87 |
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