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SDM
2006-06-21
16:50
Hiroshima
Faculty Club, Hiroshima Univ.
Surface Microroughness of Silicon -- Mechanism and Its Reduction --
Hitoshi Morinaga
,
Kenji Shimaoka
,
Tadahiro Ohmi
(
Tohoku Univ.
)
It is known that silicon surfaces are roughened with wet processes. It was revealed that light, such as fluorescent lig...
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SDM2006-50
pp.49-54
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