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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2011-07-04
16:40
Aichi VBL, Nagoya Univ. Simultaneous Crystallization of Double-Layered Si Thin Films and Fabciration of Thin Film Devices
Masahiro Horita, Koji Yamasaki, Emi Machida, Yasuaki Ishikawa, Yukiharu Uraoka (NAIST) SDM2011-68
We investigate simultaneous crystallization of double-layered silicon thin films on glass substrates by means of green l... [more] SDM2011-68
pp.103-108
SDM 2010-12-17
16:25
Kyoto Kyoto Univ. (Katsura) Evaluation of two layers simultaneous crystallized LTPS-TFT memory by the laser irradiation from the back.
Masahiro Matsue, Kazunori Ichikawa, Hiroshi Akamatsu (KCCT), Koji Yamasaki, Masahiro Horita, Yukiharu Uraoka (NAIST) SDM2010-200
We have reported that the stacked a-Si layers were simultaneous crystallized by the green laser irradiation. In this stu... [more] SDM2010-200
pp.83-86
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