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ED
,
CPM
,
SDM
2006-05-19
11:40
Aichi
VBL, Toyohashi University of Technology
Fabrication of patterned GaInAs/GaAs hetero-structure using amorphous arsenic mask
Yosuke Noritake
,
Takumi Yamada
,
Masao Tabuchi
,
Yoshikazu Takeda
(
Nagoya Univ.
)
To form patterned GaInAs/GaAs hetero-structures, we propose a new formation process using amorphous As as a mask. The p...
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ED2006-35
CPM2006-22
SDM2006-35
pp.85-90
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