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Committee Date Time Place Paper Title / Authors Abstract Paper #
VLD, DC, IPSJ-SLDM, CPSY, RECONF, ICD, CPM
(Joint) [detail]		 2015-12-02
17:10		 Nagasaki Nagasaki Kinro Fukushi Kaikan Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning
Takeshi Ihara, Atsushi Takahashi (Tokyo Tech) VLD2015-53 DC2015-49		 Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14 nm technology node.
Althou... [more]		 VLD2015-53 DC2015-49
pp.93-98
VLD 2015-03-02
13:25		 Okinawa Okinawa Seinen Kaikan A cut-pattern reduction method for routing in Self-Aligned Double Patterning
Noriyuki Takahashi, Takeshi Ihara, Atsushi Takahashi (Tokyo Tech) VLD2014-154		 In Self-Aligned Double Patterning (SADP),
a routing method that generates a SADP friendly routing pattern efficiently
... [more]		 VLD2014-154
pp.7-12
VLD 2014-03-04
14:15		 Okinawa Okinawa Seinen Kaikan Self-Aligned Double Patterning-Aware Modified Two-color Grid Routing
Takeshi Ihara, Atsushi Takahashi (Tokyo Inst. of Tech.), Chikaaki Kodama (TOSHIBA) VLD2013-150		  [more] VLD2013-150
pp.93-98
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