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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2018-01-30
15:30		 Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Talk] Sub-nm EOT Ferroelectric HfO2 on p+Ge with Highly Reliable Field Cycling Properties
Xuan Tian, Lun Xu, Shigehisa Shibayama, Tomonori Nishimura, Takeaki Yajima (Univ. of Tokyo), Shinji Migita (AIST), Akira Toriumi (Univ. of Tokyo) SDM2017-96		 5-nm-thick ferroelectric Y-doped HfO2 was intensively studied. The thickness dependence of ferroelectric properties indi... [more] SDM2017-96
pp.21-24
SDM 2017-01-30
15:30		 Tokyo Kikai-Shinko-Kaikan Bldg. [Invited Talk] General relationship for cation and anion doping effects on ferroelectric HfO2 formation
Xu Lun, Shibayama Shigehisa, Izukashi Kazutaka, Nishimura Tomonori, Yajima Takeaki (Univ. of Tokyo), Migita Shinji (AIST), Toriumi Akira (Univ. of Tokyo) SDM2016-137		 This work discusses the general relationship for cation and anion doping effects on the HfO2 para-/ferroelectric transit... [more] SDM2016-137
pp.29-32
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