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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
EID, SDM |
2015-12-14 11:00 |
Kyoto |
Ryukoku University, Avanti Kyoto Hall |
Fabrication of FinFET Structure with High Selectivity Etching Using Newly Developed SiNx Etch Gas Takashi Kojiri (Tohoku Univ./ZEON), Tomoyuki Suwa, Keiichi Hashimoto, Akinobu Teramoto, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.) EID2015-9 SDM2015-92 |
We evaluated the properties of newly developed SiNx etch gas (SSY525). The gas indicated high selectivity as 30 ~ 60 for... [more] |
EID2015-9 SDM2015-92 pp.1-4 |
SDM |
2015-10-30 10:20 |
Miyagi |
Niche, Tohoku Univ. |
A Device Simulation Study on Tunneling and Diffusion Current Hybrid MOSFET Kiichi Furukawa, Akinobu Teramoto, Rihito Kuroda, Tomoyuki Suwa, Keiichi Hashimoto, Takashi Kojiri, Shigetoshi Sugawa (Tohoku Univ.) SDM2015-77 |
[more] |
SDM2015-77 pp.35-40 |
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