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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2008-06-13
16:10		 Ishikawa Kanazawa University Study on Deterioration of Resist Removal Efficiency in SPM, and Experimental Proof of Ashingless Resist Removal Using Electrolyzed Sulfuric Acid Solution
Tatsuo Nagai, Haruyoshi Yamakawa, Minoru Uchida, Toru Otsu, Norihito Ikemiya (Kurita) ED2008-29		 It is known that resist removal capability of SPM gradually deteriorates during the stripping process. Theoretical expl... [more] ED2008-29
pp.41-46
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