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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
MRIS, CPM, ITE-MMS, OME [detail] |
2023-10-26 16:40 |
Niigata |
Niigata Univ. Ekiminami Campus (Primary: On-site, Secondary: Online) |
MRIS2023-13 CPM2023-47 OME2023-34 |
(To be available after the conference date) [more] |
MRIS2023-13 CPM2023-47 OME2023-34 pp.20-21 |
SDM |
2017-10-26 10:20 |
Miyagi |
Niche, Tohoku Univ. |
A High Sensitivity Realtime Compact Gas Concentration Sensor using UV absorption spectroscopy and Charge Amplifier Circuit Hidekazu Ishii (Tohoku Univ.), Masaaki Nagase, Nobukazu Ikeda (Fujikin Inc.), Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.) SDM2017-56 |
Metal organic (MO) gases are used in electronic device manufacturing processes such as semiconductors, power devices, LE... [more] |
SDM2017-56 pp.35-38 |
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