Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2010-07-29 13:30 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Fabrication of CuInO2 thin films using RF sputtering and studies of annealing effects Tsubasa Ogawa, Takuya Yokomoto, Rinpei Hayashibe, Tomohiko Yamakami, Katsuya Abe (Shinshu Univ.) |
[more] |
|
CPM |
2010-07-29 13:55 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Growth of Fe3O4/GaAs Epitaxial Thin Films by Gas Flow Sputtering Hiroshi Sakuma, Yuki Shidara, Yasuhito Kagi, Ryo Suzuki, Kiyoshi Ishii (Utsunomiya Univ.) CPM2010-31 |
The epitaxial growth of oxides on semiconductors is generally associated with difficulty. Magnetite (Fe3O4) is a half me... [more] |
CPM2010-31 pp.1-4 |
CPM |
2010-07-29 14:20 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Characteristic of AZO thin films deposited at room temperature by sputtering method Hidehiko Shimizu, Jun Kashiide, Haruo Iwano, Takahiro Kawakami, Yasuo Fukushima, Kotaro Nagata (Niigata Univ.), Yoichi Hoshi (Tokyo Polytechnic Univ.) CPM2010-32 |
[more] |
CPM2010-32 pp.5-9 |
CPM |
2010-07-29 14:55 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Epitaxial growth of ZnO films using hot water molecules generated by catalytic reaction Masami Tahara, Hitoshi Miura, Tomoyoshi Kuroda, Hiroshi Nishiyama, Kanji Yasui (Nagoka Univ. of Tech.) CPM2010-33 |
We have developed a new CVD method for thin film growth of metal oxides using a reaction between organometallic compound... [more] |
CPM2010-33 pp.11-15 |
CPM |
2010-07-29 15:20 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Proposal and Experimental Evaluation of A Novel Method for Eye-Pattern Improvement on Transmission Lines Masami Ishiguro, Yuki Shimauchi, Noriyuki Aibe (Tsukuba Univ.), Ikuo Yoshihara (Miyazaki Univ.), Moritoshi Yasunaga (Tsukuba Univ.) CPM2010-34 |
Recently GHz frequency signal is required to be propagated in the PCB (printed circuit board) with low distortions. To o... [more] |
CPM2010-34 pp.17-22 |
CPM |
2010-07-29 15:50 |
Hokkaido |
Michino-Eki Shari Meeting Room |
[Invited Talk]
Science in porosity engineering of low-k dielectrics using supercritical carbon dioxide
-- Pore characterization and pore cleaning -- Eiichi Kondoh (Univ. of Yamanashi.) CPM2010-35 |
Supercritical carbon dioxide possesses nano-penetration ability, zero surface tension and solvent capability. These prop... [more] |
CPM2010-35 pp.23-28 |
CPM |
2010-07-30 09:30 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Low temperature of deposition of ZrNx film using radical reaction Masaru Sato, Mayumi B. Takeyama (kitami Inst. of Tech.), Yuichiro Hayasaka, Eiji Aoyagi (Tohoku Univ.), Atsushi Noya (kitami Inst. of Tech.) CPM2010-36 |
Recently, an increase in the integration density of the Si-ULSI system is realized in the 3-D packaging
technology. A t... [more] |
CPM2010-36 pp.29-34 |
CPM |
2010-07-30 09:55 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Atomic layer deposition (ALD) of vanadium nitride films using TDEAV Mayumi B. Takeyama, Masaru Sato (kitami Inst. of Tech.), Hiroshi Sudoh, Hideaki Machida (Gas-phase Growth Ltd.), Shun Ito, Eiji Aoyagi (Tohoku Univ.), Atsushi Noya (kitami inst. of tech.) CPM2010-37 |
An extremely thin barrier deposited at a low temperature is desired in Cu interconnects of 32 nm node technologies. We ... [more] |
CPM2010-37 pp.35-38 |
CPM |
2010-07-30 10:20 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Formation of AlN films on Si substrate by Pulsed Laser Deposition Hideki Nakazawa, Daiki Suzuki, Ryoichi Osozawa, Hiroshi Okamoto (Hirosaki Univ.) CPM2010-38 |
We have grown aluminum nitride (AlN) films on Si substrate by pulsed laser deposition using KrF excimer laser and an AlN... [more] |
CPM2010-38 pp.39-44 |
CPM |
2010-07-30 10:55 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Field Emission from Horizontally Aligned Carbon Nanotube Hirofumi Saito, Tomohiko Yamakami, Rinpei Hayashibe, Takumi Ooike, Masahiro Yamashita, Kiichi Kamimura (Shinshu Univ.) CPM2010-39 |
To estimate the field emission current associated with an array of carbon nanotubes (CNTs) parallel to a planar cathode ... [more] |
CPM2010-39 pp.45-48 |
CPM |
2010-07-30 11:20 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Photo-Assisted Polymerization of C60 Synthesized by Liquid-Liquid-Interfacial Precipitation Method Daiki Koide, Shota Katou, Eri Ikeda, Nobuyuki Iwata, Hiroshi Yamamoto (Nihon Univ.) CPM2010-40 |
[more] |
CPM2010-40 pp.49-54 |
CPM |
2010-07-30 11:45 |
Hokkaido |
Michino-Eki Shari Meeting Room |
Characteristics of Visible Light Emission from Sn-doped SiO2 Thin Films by UV Irradiation Shota Mochizuki, Satoru Noge (Numazu Nat Coll. of Tech.) CPM2010-41 |
[more] |
CPM2010-41 pp.55-60 |