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Technical Committee on Component Parts and Materials (CPM) (Searched in: 2006)
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Search Results: Keywords 'from:2006-11-09 to:2006-11-09'
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| Search Results: Conference Papers |
| Conference Papers (Available on Advance Programs) (Sort by: Date Ascending) |
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| Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
| CPM |
2006-11-09
13:30 |
Ishikawa |
Kanazawa Univ. |
Prepration of AZO thin films by sputtering method
Ayumu Kawakami, Toru Noguchi, Akiyuki Higashide, Shinsuke Miyazaki, Hidehiko Shimizu, Takeo Maruyama, Haruo Iwano, Takahiro Kawakami (Niigata Univ.), Yoichi Hoshi (T.P.U.) |
[more] |
CPM2006-113
pp.1-5 |
| CPM |
2006-11-09
13:55 |
Ishikawa |
Kanazawa Univ. |
Prepration of ITO thin films on plastic substrate.
Masaki Takeuchi, Kazuya Morishita, Takeshi Umetsu, Yusuke Nakata, Shinsuke Miyazaki, Hidehiko Shimizu, Takeo Maruyama, Haruo Iwano, Takahiro Kawakami (Niigata Univ.), Yoichi Hoshi (Tokyo Polytechnics Univ.), Masahiro Minagawa (Nippon Seiki) |
[more] |
CPM2006-114
pp.7-11 |
| CPM |
2006-11-09
14:20 |
Ishikawa |
Kanazawa Univ. |
Fabrication of Cr2O3 Thin Films by RF Magnetron Sputtering
Takeshi Asada, Kenjirou Nagase, Takayuki Yamada, Nobuyuki Iwata, Hiroshi Yamamoto (Nihon univ) |
[more] |
CPM2006-115
pp.13-18 |
| CPM |
2006-11-09
14:45 |
Ishikawa |
Kanazawa Univ. |
Growth Control of Carbon Nanotubes on Ni/Mo Bilayer
Hiroki Okuyama, Nobuyuki Iwata, Hiroshi Yamamoto (Nihon Univ.) |
[more] |
CPM2006-116
pp.19-24 |
| CPM |
2006-11-09
15:20 |
Ishikawa |
Kanazawa Univ. |
Cathodo-Luminescence study of AlInN films grown by RF-MBE
Yu Mimura, Wataru Terashima, Song-Bek Che, Yoshihiro Ishitani, Akihiko Yoshikawa (Chiba Univ.) |
[more] |
CPM2006-117
pp.25-30 |
| CPM |
2006-11-09
15:45 |
Ishikawa |
Kanazawa Univ. |
Reactive Sputter Deposition of AlN Film and Its Application to LD Submount
Akihiro Shiono, Masahide Nakakuki, Isao Kobayashi, Tomohiko Yamakami, Rinpei Hayashibe (Shinshu Univ.), Motoki Obata (CITIZEN FINE TECH), Katsuya Abe, Kiichi Kamimura (Shinshu Univ.) |
[more] |
CPM2006-118
pp.31-35 |
| CPM |
2006-11-09
16:10 |
Ishikawa |
Kanazawa Univ. |
Thermal stability and interface moｒphology in Cu/ZrN/SiOC/Si system
Atsushi Noya, Masaru Sato, Mayumi B. Takeyama (Kitami Inst. of Technol.), Eiji Aoyagi (Tohoku Univ.) |
[more] |
CPM2006-119
pp.37-40 |
| CPM |
2006-11-09
16:35 |
Ishikawa |
Kanazawa Univ. |
Novel PVD process of extremely-thin TiNx barrier with radical reaction for Cu interconnects
Mayumi B. Takeyama, Tadayoshi Yanagita, Atsushi Noya (Kitami Inst. of Technol.) |
[more] |
CPM2006-120
pp.41-46 |
| CPM |
2006-11-09
17:00 |
Ishikawa |
Kanazawa Univ. |
Barrier properties of HfNx thin films prepared by hot wire method between Cu interconnects and SiO2 or SiOC layer
Masaru Sato, Mayumi B. Takeyama, Atsushi Noya (Kitami Inst. of Technol.) |
[more] |
CPM2006-121
pp.47-52 |
| CPM |
2006-11-10
09:00 |
Ishikawa |
Kanazawa Univ. |
Surface roughness control of SiGe layer deposited by Ion Beam Sputtering toward strained Si fabrication
Jun Yamamoto, Yuta Sakaguchi, Kimihiro Naruse, Kimihiro Sasaki (Kanazawa Univ.) |
[more] |
CPM2006-122
pp.53-57 |
| CPM |
2006-11-10
09:25 |
Ishikawa |
Kanazawa Univ. |
Thermoelectric performance of deteriorated SiGe thin films
-- influence from substrate --
Akinari Matoba, Toshio Hayahira, Takahiro Tsuduki, Kimihiro Sasaki (Kanazawa Univ.), Youich Okamoto, Jun Morimoto (Defense Univ.) |
[more] |
CPM2006-123
pp.59-63 |
| CPM |
2006-11-10
09:50 |
Ishikawa |
Kanazawa Univ. |
Formation of high density nanodots aiming for Ge embedded SiC
Tetsushi Kanemaru, Tomoaki Ogiwara, Kanji Yasui, Tadashi Akahane, Masasuke Takata (Nagaoka Univ. Tech.) |
[more] |
CPM2006-124
pp.65-70 |
| CPM |
2006-11-10
10:15 |
Ishikawa |
Kanazawa Univ. |
Degradation of MOVPE InN during the growth
Kenichi Sugita, Yoshinori Hochin, Akihiro Hashimoto, Akio Yamamoto (Univ. of Fukui) |
[more] |
CPM2006-125
pp.71-74 |
| CPM |
2006-11-10
10:50 |
Ishikawa |
Kanazawa Univ. |
Growth delay time on fabricating thin ZrO2 film by limited reaction sputtering
Hidetaka Sugiyama, Nobuo Kojima, Taro Yamagishi, Zhou Ying, Kimihiro Sasaki (Kanazawa Univ.) |
[more] |
CPM2006-126
pp.75-79 |
| CPM |
2006-11-10
11:15 |
Ishikawa |
Kanazawa Univ. |
The practical sputtering system for oxide films by oxygen ion implantation
Shinobu Chiba, Kimihiro Sasaki (Kanazawa Univ.), Akira Motoki (CBC Co.,Ltd), Tomonobu Hata (JST), Akihiko Ito (SHIBAURA MECHATRONICS Corp.) |
[more] |
CPM2006-127
pp.81-86 |
| CPM |
2006-11-10
11:40 |
Ishikawa |
Kanazawa Univ. |
Effect of Surface Roughness of Substrate on Structure and Temperature Coefficient of Resistance (TCR) of NiCr Films Deposited by Sputtering
Satoshi Iwatsubo, Takaaki Shimizu (Toyama Ind. Tech. Ctr.) |
[more] |
CPM2006-128
pp.87-92 |
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