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| Chair |
|
Shigeyoshi Watanabe (Shonan Inst. of Tech.) |
| Vice Chair |
|
Toshihiro Sugii (Fujitsu Microelectronics) |
| Secretary |
|
Shigeru Kawanaka (Toshiba), Hisahiro Anzai (Sony) |
| Assistant |
|
Syunichiro Ohmi (Tokyo Inst. of Tech.) |
|
| Conference Date |
Thu, Oct 9, 2008 13:30 - 17:45
Fri, Oct 10, 2008 10:00 - 17:15 |
| Topics |
Process Science and Novel Process Technologies |
| Conference Place |
New Industry Creation Hatchery Center, Tohoku University |
| Address |
6-6-10, Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan |
| Transportation Guide |
By taking Bus from Sendai station, BUS pool #9, please ride on "Dobutsukouen JUNKAN", "MIYAKYO-DAI" or "AOBA-DAI". The nearest BUS stop for the FFF is "JOUHOUKAGAKUKENKYUUKA MAE" (just after the Faculty of Science and the Faculty of Phermacy Science"
http://www.fff.niche.tohoku.ac.jp/en/index.php?%5B%5BMap%5D%5D |
Contact
Person |
Associate Prof. Akinobu Teramoto
022-795-3977 |
Copyright
and
reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Thu, Oct 9 PM
13:30 - 17:45 |
| (1) |
13:30-14:00 |
Evaluation of Post Cu-CMP Cleaning Chemicals for Non-Porous Ultra Low-k Dielectric Fluorocarbon Film  SDM2008-149 |
Xun Gu, Takenao Nemoto, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) |
| (2) |
14:00-14:30 |
Investigation of Novel End-Point-Detection for Ta/Cu CMP SDM2008-150 |
Xun Gu, Takenao Nemoto (Tohoku Univ.), Ara Philipossian, Yasa Adi Sampurno (Univ. of Arizona/Araca), Jiang Cheng (Araca), Yun Zhuang (Univ. of Arizona/Araca), Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) |
| (3) |
14:30-15:00 |
Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol SDM2008-151 |
Masayuki Numata, Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito (Tohoku Univ.) |
| (4) |
15:00-15:30 |
Development of Multi-Scale Simulator for lifetime of Interconnect and its application to Cu lines SDM2008-152 |
Hideyuki Tsuboi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A Del Calpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| |
15:30-15:45 |
Break ( 15 min. ) |
| (5) |
15:45-16:15 |
Computational Study on Friction Behavior and Nanostructure of Diamond-like Carbon (DLC) SDM2008-153 |
Takanori Kuriaki, Yusuke Morita, Tasuku Onodera, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| (6) |
16:15-16:45 |
Tight-Binding Quantum Chemistry Study on Excitation Properties of Perylene with Acrylic Acid on Anatas(001) Surface SDM2008-154 |
Chen Lv, Kei Ogiya, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| (7) |
16:45-17:15 |
A Computational Study on Secondary Electron Emission property of Protecting Layer for Plasma Display Panels SDM2008-155 |
Kazumi Serizawa, Itaru Yamashita, Hiroaki Onuma (Tohoku Univ.), Hiromi Kikuchi (Tohoku Univ./Hiroshima Univ.), Masaki Kitagaki (Hiroshima Univ.), Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Del Carpio Carlos Del Carpio, Momoji Kubo (Tohoku Univ.), Hiroshi Kajiyama (Hiroshima Univ.) |
| (8) |
17:15-17:45 |
Development of characterization/spectroscopic simulators based on ultra-accelerated quantum chemical molecular dynamics method and its application to Si semiconductors SDM2008-156 |
Akira Endou, Itaru Yamashita, Kazumi Serizawa, Hiroaki Onuma, Tasuku Onodera, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| |
- |
Social Gathering |
Fri, Oct 10 AM
10:00 - 17:15 |
| (9) |
10:00-10:30 |
Electron Transport Simulation of Dye-sensitized TiO2 Electrode based on 3D Porous Structure SDM2008-157 |
Kei Ogiya, Chen Lv, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| (10) |
10:30-11:00 |
A Computational Chemistry Study on Structure and Carrier Transport Property of Light Emitting Materials SDM2008-158 |
Itaru Yamashita, Hiroaki Onuma, Kazumi Serizawa, Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ) |
| (11) |
11:00-11:30 |
Structure Analysis of Phosphors Materials by Experiment Integrated Computational Chemistry SDM2008-159 |
Hiroaki Onuma, Itaru Yamashita, Kazumi Serizawa, Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| (12) |
11:30-12:00 |
Development of Ultra-accelerated Quantum Chemical Molecular Dynamics Method for Ferroelectric Properties of Perovskite BaTiO3 SDM2008-160 |
HongJun Xiao, Takashi Hirai, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| |
12:00-13:00 |
Lunch Break ( 60 min. ) |
| (13) |
13:00-13:30 |
The Application Property of B18H22 Implantation for Millisecond Annealing SDM2008-161 |
Yoji Kawasaki, Seiichi Endo, Masashi Kitazawa, Yoshiki Maruyama, Tomohiro Yamashita, Takashi Kuroi, Hidefumi Yoshimura, Masahiro Yoneda (Renesas) |
| (14) |
13:30-14:00 |
A study on work function modulation in PtSi alloying with Hf SDM2008-162 |
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) |
| (15) |
14:00-14:30 |
Statistical evaluation of characteristics variation and RTS noise of MOSFETs SDM2008-163 |
Takafumi Fujisawa, Shigetoshi Sugawa, Syunichi Watabe, Kenichi Abe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) |
| (16) |
14:30-15:00 |
Impact of Fully Depleted Silicon-On-Insulator Accumualation-mode CMOS on Si(110) SDM2008-164 |
Ching Foa Tye, Weitao Cheng, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) |
| |
15:00-15:15 |
Break ( 15 min. ) |
| (17) |
15:15-15:45 |
Correlation between Stress Induced Leakage Current and Random Telegraph Signal noise SDM2008-165 |
Yuki Kumagai, Akinobu Teramoto, Kenichi Abe, Takafumi Fujisawa, Syunichi Watabe, Tomoyuki Suwa, Naoto Miyamoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) |
| (18) |
15:45-16:15 |
Influence of B and P dopants on SiO2 film characteristics SDM2008-166 |
Satoshi Nagashima, Hiroshi Akahori (Toshiba) |
| (19) |
16:15-16:45 |
Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy SDM2008-167 |
Tomoyuki Suwa (Tohoku Univ.), Takashi Aratani (Shin-Etsu Chemi.), Masaaki Higuchi (Toshiba), Shigetoshi Sugawa (Tohoku Univ.), Eiji Ikenaga (JASRI), Jiro Ushio (Hitachi), Hiroshi Nohira (Musashi Inst. of Tech.), Akinobu Teramoto, Tadahiro Ohmi, Takeo Hattori (Tohoku Univ.) |
| (20) |
16:45-17:15 |
The data analysis and measurement technique of the atomic force microscopy for the atomically flat silicon surface SDM2008-168 |
Masahiro Konda, Akinobu Teramoto, Tomoyuki Suwa, Rihito Kuroda, Tadahiro Ohmi (Tohoku Univ) |
| Announcement for Speakers |
| General Talk (30) | Each speech will have 25 minutes for presentation and 5 minutes for discussion. |
| Contact Address and Latest Schedule Information |
| SDM |
Technical Committee on Silicon Device and Materials (SDM) [Latest Schedule]
|
| Contact Address |
Shigeru KAWANAKA (Toshiba)
TEL 045-776-5670, FAX 045-776-4104
E-  ge       ba |
Last modified: 2008-09-11 09:46:21
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