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| Presentation | 2022-01-25 11:25 Transversal type BAW filter based on c-axis zig-zag polarization inverted ScAlN multilayers Kota Izumi, Takahiko Yanagitani (Waseda Univ.)  US2021-59 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Surface acoustic wave (SAW) transversal type filter is attractive because of their independent control of amplitude and phase responses. On the other hand, for the RF filter in the mobile phone, the resonator type SAW ladder filters are gradually replaced by the bulk acoustic wave (BAW) resonator type ladder filters due to their excellent power handling capability. Although the crystal filters based on one pair of the piezoelectric layer have been reported, there are no reports on BAW transversal type filter probably because of the difficulty of growth of polarization inversion layers. In this study, we propose the transversal type BAW filters based on the polarization inversion layers. The BAW transversal type filters expected to possess high power tolerance compared with SAW type filters with IDT electrode. c-Axis zig-zag tilted polarization inverted ScAlN multilayer were grown on both sides of Z-cut quartz substrate whose shear mode acoustic impedance is close to the ScAlN layer. As a result, by transmitting and receiving the bulk quasi-shear wave, BAW transversal type filters were obtained. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Transversal filter / c-Axis tilted ScAlN film / Polarity inverted multilayer piezoelectric film / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 121, no. 348, US2021-59, pp. 5-10, Jan. 2022. | |
| Paper # | US2021-59 | |
| Date of Issue | 2022-01-18 (US) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2021-59 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2022-01-25 - 2022-01-25 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | High-intensity ultrasound, Ultrasonics, etc. |
| Paper Information | |
| Registration To | US |
| Conference Code | 2022-01-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Transversal type BAW filter based on c-axis zig-zag polarization inverted ScAlN multilayers |
| Sub Title (in English) | |
| Keyword(1) | Transversal filter |
| Keyword(2) | c-Axis tilted ScAlN film |
| Keyword(3) | Polarity inverted multilayer piezoelectric film |
| Keyword(4) | |
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| 1st Author's Name | Kota Izumi |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2022-01-25 11:25:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2021-59 |
| Volume (vol) | vol.121 |
| Number (no) | no.348 |
| Page | pp.5-10 |
| #Pages | 6 |
| Date of Issue | 2022-01-18 (US) |
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