| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2021-02-05 13:45 Characteristic properties of Co-Zr alloy as a single-layer barrier Yuki Yamada, Masataka Yahagi, Junichi Koike (Tohoku Univ.)  SDM2020-56 Link to ES Tech. Rep. Archives: SDM2020-56 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The purpose of this work is to replace the thick double layer of Ta liner and TaN barrier with a single layer of Co alloy having liner/barrier functions with thermally stable amorphous structure. The CALPHAD method was employed to calculate T0 curve as an indicator of amorphous stability in various Co alloy systems. Co-Zr system was predicted to be a potential candidate. Based on the calculated results, ultra-thin Co-Zr films were investigated for adhesion and barrier property. Cu/Co-Zr/SiO2 samples exhibited a good barrier property. However, the Co-Zr layer was decomposed at high temperature, which caused an increase in film resistivity due to Co diffusion to the Cu overlayer. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | LSI / Cu interconnect / diffusion barrier / CALPHAD method / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 120, no. 359, SDM2020-56, pp. 7-10, Feb. 2021. | |
| Paper # | SDM2020-56 | |
| Date of Issue | 2021-01-29 (SDM) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2020-56 Link to ES Tech. Rep. Archives: SDM2020-56 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2021-02-05 - 2021-02-05 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2021-02-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristic properties of Co-Zr alloy as a single-layer barrier |
| Sub Title (in English) | |
| Keyword(1) | LSI |
| Keyword(2) | Cu interconnect |
| Keyword(3) | diffusion barrier |
| Keyword(4) | CALPHAD method |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Yuki Yamada |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Masataka Yahagi |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Junichi Koike |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | |
| 4th Author's Affiliation | () |
| 5th Author's Name | |
| 5th Author's Affiliation | () |
| 6th Author's Name | |
| 6th Author's Affiliation | () |
| 7th Author's Name | |
| 7th Author's Affiliation | () |
| 8th Author's Name | |
| 8th Author's Affiliation | () |
| 9th Author's Name | |
| 9th Author's Affiliation | () |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2021-02-05 13:45:00 |
| Presentation Time | 20 minutes |
| Registration for | SDM |
| Paper # | SDM2020-56 |
| Volume (vol) | vol.120 |
| Number (no) | no.359 |
| Page | pp.7-10 |
| #Pages | 4 |
| Date of Issue | 2021-01-29 (SDM) |
[Return to Top Page]