Paper Abstract and Keywords |
Presentation |
2020-10-22 14:00
Investigation on millisecond solid phase crystallization of amorphous silicon films induced by micro thermal plasma jet. Hoa Thi Khanh Nguyen, Hiroaki Hanafusa, Yuri Mizukawa (Hiroshima Univ.), Shohei Hayashi (Toray Res. Cent.), Seiichiro Higashi (Hiroshima Univ.) SDM2020-18 Link to ES Tech. Rep. Archives: SDM2020-18 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 120, no. 205, SDM2020-18, pp. 20-24, Oct. 2020. |
Paper # |
SDM2020-18 |
Date of Issue |
2020-10-15 (SDM) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SDM2020-18 Link to ES Tech. Rep. Archives: SDM2020-18 |
Conference Information |
Committee |
SDM |
Conference Date |
2020-10-22 - 2020-10-22 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Online |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Process Science and New Process Technology |
Paper Information |
Registration To |
SDM |
Conference Code |
2020-10-SDM |
Language |
English |
Title (in Japanese) |
(See Japanese page) |
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Title (in English) |
Investigation on millisecond solid phase crystallization of amorphous silicon films induced by micro thermal plasma jet. |
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1st Author's Name |
Hoa Thi Khanh Nguyen |
1st Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
2nd Author's Name |
Hiroaki Hanafusa |
2nd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
3rd Author's Name |
Yuri Mizukawa |
3rd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
4th Author's Name |
Shohei Hayashi |
4th Author's Affiliation |
Toray Research Center (Toray Res. Cent.) |
5th Author's Name |
Seiichiro Higashi |
5th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
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Speaker |
Author-1 |
Date Time |
2020-10-22 14:00:00 |
Presentation Time |
30 minutes |
Registration for |
SDM |
Paper # |
SDM2020-18 |
Volume (vol) |
vol.120 |
Number (no) |
no.205 |
Page |
pp.20-24 |
#Pages |
5 |
Date of Issue |
2020-10-15 (SDM) |