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| Presentation | 2020-09-28 15:15 Extraction of kt2 of HBAR by new conversion loss without acoustic losses in the substrate Ryota Tatsumi, Yanagitani Takahiko (Waseda Univ.)  US2020-37 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure (HBAR) or epitaxial wafers. kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss (CL) method, which can extract the kt2 from HBAR. In this study, we introduce two CL methods: (i) the method subtracting the acoustic losses in the substrate, (ii) the method using electromagnetic signal including no acoustic losses. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | electromechanical coupling coefficient / HBAR / ScAlN / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 120, no. 174, US2020-37, pp. 57-60, Sept. 2020. | |
| Paper # | US2020-37 | |
| Date of Issue | 2020-09-21 (US) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2020-37 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2020-09-28 - 2020-09-28 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | US |
| Conference Code | 2020-09-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Extraction of kt2 of HBAR by new conversion loss without acoustic losses in the substrate |
| Sub Title (in English) | |
| Keyword(1) | electromechanical coupling coefficient |
| Keyword(2) | HBAR |
| Keyword(3) | ScAlN |
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| 1st Author's Name | Ryota Tatsumi |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Yanagitani Takahiko |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2020-09-28 15:15:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2020-37 |
| Volume (vol) | vol.120 |
| Number (no) | no.174 |
| Page | pp.57-60 |
| #Pages | 4 |
| Date of Issue | 2020-09-21 (US) |
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