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| Presentation | 2020-02-07 09:35 [Invited Talk] Impact of Homogeneously Dispersed Al Nanoclusters by Si-monolayer Insertion into Hf0.5Zr0.5O2 Film on FeFET Memory Array with Tight Threshold Voltage Distribution Tadashi Yamaguchi, Keiichi Maekawa, Takahiro Ohara, Atsushi Amo, Eiji Tsukuda, Kenichiro Sonoda, Hiroshi Yanagita, Masao Inoue, Masazumi Matsuura, Tomohiro Yamashita (Renesas)  SDM2019-89 Link to ES Tech. Rep. Archives: SDM2019-89 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 410, SDM2019-89, pp. 5-8, Feb. 2020. | |
| Paper # | SDM2019-89 | |
| Date of Issue | 2020-01-31 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2019-89 Link to ES Tech. Rep. Archives: SDM2019-89 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2020-02-07 - 2020-02-07 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo University-Hongo |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2020-02-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Impact of Homogeneously Dispersed Al Nanoclusters by Si-monolayer Insertion into Hf0.5Zr0.5O2 Film on FeFET Memory Array with Tight Threshold Voltage Distribution |
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| 1st Author's Name | Tadashi Yamaguchi |
| 1st Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 2nd Author's Name | Keiichi Maekawa |
| 2nd Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 3rd Author's Name | Takahiro Ohara |
| 3rd Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 4th Author's Name | Atsushi Amo |
| 4th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 5th Author's Name | Eiji Tsukuda |
| 5th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 6th Author's Name | Kenichiro Sonoda |
| 6th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 7th Author's Name | Hiroshi Yanagita |
| 7th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 8th Author's Name | Masao Inoue |
| 8th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 9th Author's Name | Masazumi Matsuura |
| 9th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
| 10th Author's Name | Tomohiro Yamashita |
| 10th Author's Affiliation | Renesas Electronics Corp. (Renesas) |
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| Speaker | Author-1 |
| Date Time | 2020-02-07 09:35:00 |
| Presentation Time | 35 minutes |
| Registration for | SDM |
| Paper # | SDM2019-89 |
| Volume (vol) | vol.119 |
| Number (no) | no.410 |
| Page | pp.5-8 |
| #Pages | 4 |
| Date of Issue | 2020-01-31 (SDM) |
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