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Paper Abstract and Keywords
Presentation 2020-01-31 11:45
Simple Photoelectrochemical Etching for Recess Gate GaN HEMT
Fumimasa Horikiri, Noboru Fukuhara (SCIOCS), Masachika Toguchi, Kazuki Miwa (Hokaido Univ.), Yoshinobu Narita, Osamu Ichikawa, Ryota Isono, Takeshi Tanaka (SCIOCS), Taketomo Sato (Hokaido Univ.)   エレソ技報アーカイブはこちら
Abstract (in Japanese) (See Japanese page) 
(in English) (Available after conference date)
Keyword (in Japanese) (See Japanese page) 
(in English) GaN / Electrochemical / Etching / Recess process / / / /  
Reference Info. IEICE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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Conference Information
Committee ED MW  
Conference Date 2020-01-31 - 2020-01-31 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Compound semiconductor, High speed and High frequency devices/Microwave technologies 
Paper Information
Registration To ED 
Conference Code 2020-01-ED-MW 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Simple Photoelectrochemical Etching for Recess Gate GaN HEMT 
Sub Title (in English)  
Keyword(1) GaN  
Keyword(2) Electrochemical  
Keyword(3) Etching  
Keyword(4) Recess process  
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1st Author's Name Fumimasa Horikiri  
1st Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
2nd Author's Name Noboru Fukuhara  
2nd Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
3rd Author's Name Masachika Toguchi  
3rd Author's Affiliation Hokkaido University (Hokaido Univ.)
4th Author's Name Kazuki Miwa  
4th Author's Affiliation Hokkaido University (Hokaido Univ.)
5th Author's Name Yoshinobu Narita  
5th Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
6th Author's Name Osamu Ichikawa  
6th Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
7th Author's Name Ryota Isono  
7th Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
8th Author's Name Takeshi Tanaka  
8th Author's Affiliation SCIOCS Company Ltd. (SCIOCS)
9th Author's Name Taketomo Sato  
9th Author's Affiliation Hokkaido University (Hokaido Univ.)
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Speaker
Date Time 2020-01-31 11:45:00 
Presentation Time 25 
Registration for ED 
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