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| Presentation | 2020-01-28 13:00 [Invited Talk] Formation of High Reliability Hydrogen-free MONOS Cells Using Deuterated Ammonia Masaki Noguchi, Tatsunori Isogai, Hiroyuki Yamashita, Keiichi Sawa, Ryota Fujitsuka, Takanori Yamanaka, Shunsuke Okada, Tomonori Aoyama, Fumiki Aiso, Junko Abe, Yoshiro Ogawa, Seiji Nakagawa, Hideshi Miyajima (KIOXIA)  SDM2019-82 Link to ES Tech. Rep. Archives: SDM2019-82 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | For high reliability non-volatile memory cell dielectrics, hydrogen-free deuterated tunnel SiON and charge-trap SiN films are demonstrated. By using deuterated ammonia (ND3) instead of ammonia (NH3) as nitridation species in ALD cycles, an ultra-high deuterium/hydrogen ratio has been successfully obtained in both films, and these films showed good endurance for program / erase stress and data retention properties in MONOS capacitors. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Reliability / ND3 / Deuterium / Hydrogen / ALD / Data Retention / DR / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 397, SDM2019-82, pp. 1-4, Jan. 2020. | |
| Paper # | SDM2019-82 | |
| Date of Issue | 2020-01-21 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2019-82 Link to ES Tech. Rep. Archives: SDM2019-82 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2020-01-28 - 2020-01-28 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2020-01-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of High Reliability Hydrogen-free MONOS Cells Using Deuterated Ammonia |
| Sub Title (in English) | |
| Keyword(1) | Reliability |
| Keyword(2) | ND3 |
| Keyword(3) | Deuterium |
| Keyword(4) | Hydrogen |
| Keyword(5) | ALD |
| Keyword(6) | Data Retention |
| Keyword(7) | DR |
| Keyword(8) | |
| 1st Author's Name | Masaki Noguchi |
| 1st Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 2nd Author's Name | Tatsunori Isogai |
| 2nd Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 3rd Author's Name | Hiroyuki Yamashita |
| 3rd Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 4th Author's Name | Keiichi Sawa |
| 4th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 5th Author's Name | Ryota Fujitsuka |
| 5th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 6th Author's Name | Takanori Yamanaka |
| 6th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 7th Author's Name | Shunsuke Okada |
| 7th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 8th Author's Name | Tomonori Aoyama |
| 8th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 9th Author's Name | Fumiki Aiso |
| 9th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 10th Author's Name | Junko Abe |
| 10th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 11th Author's Name | Yoshiro Ogawa |
| 11th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 12th Author's Name | Seiji Nakagawa |
| 12th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 13th Author's Name | Hideshi Miyajima |
| 13th Author's Affiliation | Kioxia Corporation (KIOXIA) |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2020-01-28 13:00:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2019-82 |
| Volume (vol) | vol.119 |
| Number (no) | no.397 |
| Page | pp.1-4 |
| #Pages | 4 |
| Date of Issue | 2020-01-21 (SDM) |
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