IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2020-01-23 13:05
[Poster Presentation] CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates
Tomoyasu Nakama, Kazuki Matsusita, Taira Watanabe, Hiroko Kominami, Kazuhiko Hara (Shizuoka Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) The hexagonal boron nitride (h-BN) thin films were grown on c-plane sapphire and Si (111) substrates by low-pressure chemical vapor deposition using BCl3 and NH3 as sources. The film grown on the Si substrate had the surface morphology similar to that on the sapphire substrate. However, it showed cathodoluminescence with improved intrinsic exciton emission, which is the first observation of intrinsic exciton emission for the h-BN films grown on Si substrate. This result leads us to expect the growth of high-quality h-BN films by the CVD with BCl3. To further improve the film properties, the heating method for substrates, the tilting angle of substrates and growth temperature were also examined.
Keyword (in Japanese) (See Japanese page) 
(in English) hexagonal boron nitride / CVD / thin film / cathodoluminescence / deep-ultraviolet luminescence / / /  
Reference Info. IEICE Tech. Rep.
Paper #  
Date of Issue  
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Download PDF

Conference Information
Committee EID ITE-IDY IEIJ-SSL SID-JC IEE-EDD  
Conference Date 2020-01-23 - 2020-01-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Tottori Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ITE-IDY 
Conference Code 2020-01-IDY-EID-SSL-JC-EDD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) CVD growth of h-BN thin films on c-plane sapphire and Si (111) substrates 
Sub Title (in English)  
Keyword(1) hexagonal boron nitride  
Keyword(2) CVD  
Keyword(3) thin film  
Keyword(4) cathodoluminescence  
Keyword(5) deep-ultraviolet luminescence  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Tomoyasu Nakama  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Kazuki Matsusita  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Taira Watanabe  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
4th Author's Name Hiroko Kominami  
4th Author's Affiliation Shizuoka University (Shizuoka Univ.)
5th Author's Name Kazuhiko Hara  
5th Author's Affiliation Shizuoka University (Shizuoka Univ.)
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker
Date Time 2020-01-23 13:05:00 
Presentation Time
Registration for ITE-IDY 
Paper #  
Volume (vol) IEICE-119 
Number (no) no.385 
Page  
#Pages IEICE- 
Date of Issue  


[Return to Top Page]

[Return to IEICE Web Page]


The Institute of Electronics, Information and Communication Engineers (IEICE), Japan