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Paper Abstract and Keywords
Presentation 2019-11-26 14:10
[Poster Presentation] Utilization of convolutional neural network for the fabrication processes of semiconductor nanostructures
Tomoki Tanoue, Kyoko Kitamura (Kyoto Inst. Tech.), Masahiro Yoshida, Kohei Suenaga, Kenji Ishizaki, Susumu Noda (Kyoto Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) Photonic-crystal laser is a surface-emitting semiconductor laser which possesses semiconductor nanostructures (photonic crystal) for lasing cavity and diffraction grating, and it has great potential to achieve broad-area, high-power oscillation. In this laser, the nanoscale three-dimensional (3D) structure affects the lasing properties. To date, therefore, 3D modeling was performed by manually extracting two-dimensional (2D) contours from the cleaved cross-sectional scanning electron microscope (SEM) images of the fabricated semiconductor nanostructures and reconstructing them in 3D space. In this study, in order to improve reproducibility and work efficiency in the modeling process, we developed a software that can automatically generate 3D models from cleaved cross-sectional SEM images, by extracting 2D contours using convolutional neural network (CNN), and 3D reconstruction using combinatorial optimization solver. In this meeting, we will report the results of 2D contour extraction, the registration process in 3D space, and the generated 3D models.
Keyword (in Japanese) (See Japanese page) 
(in English) Photonic crystal laser / Convolutional neural network / / / / / /  
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Conference Information
Committee RISING  
Conference Date 2019-11-26 - 2019-11-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Fukutake Learning Theater, Hongo Campus, Univ. Tokyo 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Researches on Super-Intelligent Networking, etc. 
Paper Information
Registration To RISING 
Conference Code 2019-11-RISING 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Utilization of convolutional neural network for the fabrication processes of semiconductor nanostructures 
Sub Title (in English)  
Keyword(1) Photonic crystal laser  
Keyword(2) Convolutional neural network  
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1st Author's Name Tomoki Tanoue  
1st Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. Tech.)
2nd Author's Name Kyoko Kitamura  
2nd Author's Affiliation Kyoto Institute of Technology (Kyoto Inst. Tech.)
3rd Author's Name Masahiro Yoshida  
3rd Author's Affiliation Kyoto University (Kyoto Univ.)
4th Author's Name Kohei Suenaga  
4th Author's Affiliation Kyoto University (Kyoto Univ.)
5th Author's Name Kenji Ishizaki  
5th Author's Affiliation Kyoto University (Kyoto Univ.)
6th Author's Name Susumu Noda  
6th Author's Affiliation Kyoto University (Kyoto Univ.)
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Date Time 2019-11-26 14:10:00 
Presentation Time 50 minutes 
Registration for RISING 
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