Paper Abstract and Keywords |
Presentation |
2019-11-26 14:10
[Poster Presentation]
Utilization of convolutional neural network for the fabrication processes of semiconductor nanostructures Tomoki Tanoue, Kyoko Kitamura (Kyoto Inst. Tech.), Masahiro Yoshida, Kohei Suenaga, Kenji Ishizaki, Susumu Noda (Kyoto Univ.) |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Photonic-crystal laser is a surface-emitting semiconductor laser which possesses semiconductor nanostructures (photonic crystal) for lasing cavity and diffraction grating, and it has great potential to achieve broad-area, high-power oscillation. In this laser, the nanoscale three-dimensional (3D) structure affects the lasing properties. To date, therefore, 3D modeling was performed by manually extracting two-dimensional (2D) contours from the cleaved cross-sectional scanning electron microscope (SEM) images of the fabricated semiconductor nanostructures and reconstructing them in 3D space. In this study, in order to improve reproducibility and work efficiency in the modeling process, we developed a software that can automatically generate 3D models from cleaved cross-sectional SEM images, by extracting 2D contours using convolutional neural network (CNN), and 3D reconstruction using combinatorial optimization solver. In this meeting, we will report the results of 2D contour extraction, the registration process in 3D space, and the generated 3D models. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Photonic crystal laser / Convolutional neural network / / / / / / |
Reference Info. |
IEICE Tech. Rep. |
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Conference Information |
Committee |
RISING |
Conference Date |
2019-11-26 - 2019-11-27 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Fukutake Learning Theater, Hongo Campus, Univ. Tokyo |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Researches on Super-Intelligent Networking, etc. |
Paper Information |
Registration To |
RISING |
Conference Code |
2019-11-RISING |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Utilization of convolutional neural network for the fabrication processes of semiconductor nanostructures |
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Photonic crystal laser |
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Convolutional neural network |
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1st Author's Name |
Tomoki Tanoue |
1st Author's Affiliation |
Kyoto Institute of Technology (Kyoto Inst. Tech.) |
2nd Author's Name |
Kyoko Kitamura |
2nd Author's Affiliation |
Kyoto Institute of Technology (Kyoto Inst. Tech.) |
3rd Author's Name |
Masahiro Yoshida |
3rd Author's Affiliation |
Kyoto University (Kyoto Univ.) |
4th Author's Name |
Kohei Suenaga |
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Kyoto University (Kyoto Univ.) |
5th Author's Name |
Kenji Ishizaki |
5th Author's Affiliation |
Kyoto University (Kyoto Univ.) |
6th Author's Name |
Susumu Noda |
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Kyoto University (Kyoto Univ.) |
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Date Time |
2019-11-26 14:10:00 |
Presentation Time |
50 minutes |
Registration for |
RISING |
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