Paper Abstract and Keywords |
Presentation |
2019-11-21 13:50
Fabrication of field emitter array with integral Si ballast resistor Hidetoshi Shinya, Hidekazu Murata, Eiji Rokuta, Hiroshi Shimoyama (Meijo Univ.), Masayoshi Nagao, Katsuhisa Murakami (AIST) ED2019-61 Link to ES Tech. Rep. Archives: ED2019-61 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The emission current from field emitter fluctuates due to surface migration and adsorption-desorption of residual gas molecules. Therefore, emission stability of field emitter array, arranged field emitter, considerably differed between each individual emitter. Inserting ballast resistor in each individual emitter would be effective to improve emission uniformity. We tried to fabricate individual resistive layer by switching deposition material in Spindt-type emitter fabrication using double layered-photoresist. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
field emitter array / emission current / resistive layer / stability / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 119, no. 305, ED2019-61, pp. 9-12, Nov. 2019. |
Paper # |
ED2019-61 |
Date of Issue |
2019-11-14 (ED) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2019-61 Link to ES Tech. Rep. Archives: ED2019-61 |
Conference Information |
Committee |
ED |
Conference Date |
2019-11-21 - 2019-11-22 |
Place (in Japanese) |
(See Japanese page) |
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Paper Information |
Registration To |
ED |
Conference Code |
2019-11-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Fabrication of field emitter array with integral Si ballast resistor |
Sub Title (in English) |
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Keyword(1) |
field emitter array |
Keyword(2) |
emission current |
Keyword(3) |
resistive layer |
Keyword(4) |
stability |
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Keyword(6) |
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1st Author's Name |
Hidetoshi Shinya |
1st Author's Affiliation |
Meijo university (Meijo Univ.) |
2nd Author's Name |
Hidekazu Murata |
2nd Author's Affiliation |
Meijo university (Meijo Univ.) |
3rd Author's Name |
Eiji Rokuta |
3rd Author's Affiliation |
Meijo university (Meijo Univ.) |
4th Author's Name |
Hiroshi Shimoyama |
4th Author's Affiliation |
Meijo university (Meijo Univ.) |
5th Author's Name |
Masayoshi Nagao |
5th Author's Affiliation |
National institute of advanced industrial science and technology (AIST) |
6th Author's Name |
Katsuhisa Murakami |
6th Author's Affiliation |
National institute of advanced industrial science and technology (AIST) |
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Speaker |
Author-1 |
Date Time |
2019-11-21 13:50:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2019-61 |
Volume (vol) |
vol.119 |
Number (no) |
no.305 |
Page |
pp.9-12 |
#Pages |
4 |
Date of Issue |
2019-11-14 (ED) |