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Paper Abstract and Keywords
Presentation 2019-11-21 13:50
Fabrication of field emitter array with integral Si ballast resistor
Hidetoshi Shinya, Hidekazu Murata, Eiji Rokuta, Hiroshi Shimoyama (Meijo Univ.), Masayoshi Nagao, Katsuhisa Murakami (AIST) ED2019-61
Abstract (in Japanese) (See Japanese page) 
(in English) The emission current from field emitter fluctuates due to surface migration and adsorption-desorption of residual gas molecules. Therefore, emission stability of field emitter array, arranged field emitter, considerably differed between each individual emitter. Inserting ballast resistor in each individual emitter would be effective to improve emission uniformity. We tried to fabricate individual resistive layer by switching deposition material in Spindt-type emitter fabrication using double layered-photoresist.
Keyword (in Japanese) (See Japanese page) 
(in English) field emitter array / emission current / resistive layer / stability / / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 305, ED2019-61, pp. 9-12, Nov. 2019.
Paper # ED2019-61 
Date of Issue 2019-11-14 (ED) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Download PDF ED2019-61

Conference Information
Committee ED  
Conference Date 2019-11-21 - 2019-11-22 
Place (in Japanese) (See Japanese page) 
Place (in English)  
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Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2019-11-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fabrication of field emitter array with integral Si ballast resistor 
Sub Title (in English)  
Keyword(1) field emitter array  
Keyword(2) emission current  
Keyword(3) resistive layer  
Keyword(4) stability  
1st Author's Name Hidetoshi Shinya  
1st Author's Affiliation Meijo university (Meijo Univ.)
2nd Author's Name Hidekazu Murata  
2nd Author's Affiliation Meijo university (Meijo Univ.)
3rd Author's Name Eiji Rokuta  
3rd Author's Affiliation Meijo university (Meijo Univ.)
4th Author's Name Hiroshi Shimoyama  
4th Author's Affiliation Meijo university (Meijo Univ.)
5th Author's Name Masayoshi Nagao  
5th Author's Affiliation National institute of advanced industrial science and technology (AIST)
6th Author's Name Katsuhisa Murakami  
6th Author's Affiliation National institute of advanced industrial science and technology (AIST)
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Date Time 2019-11-21 13:50:00 
Presentation Time 25 
Registration for ED 
Paper # IEICE-ED2019-61 
Volume (vol) IEICE-119 
Number (no) no.305 
Page pp.9-12 
#Pages IEICE-4 
Date of Issue IEICE-ED-2019-11-14 

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