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Paper Abstract and Keywords
Presentation 2019-10-24 16:10
Observation of Fluctuation of Magnetron Sputtering Plasmas Using High-speed Video Camera
Shintaro Yamazaki, Tetsuya Goto, Manabu Suzuki, Rihito Kuroda, Shigetoshi Sugawa (Tohoku Univ.) SDM2019-67
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 239, SDM2019-67, pp. 69-72, Oct. 2019.
Paper # SDM2019-67 
Date of Issue 2019-10-16 (SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2019-10-23 - 2019-10-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Niche, Tohoku Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Process Science and New Process Technology 
Paper Information
Registration To SDM 
Conference Code 2019-10-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Observation of Fluctuation of Magnetron Sputtering Plasmas Using High-speed Video Camera 
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1st Author's Name Shintaro Yamazaki  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Tetsuya Goto  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Manabu Suzuki  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Rihito Kuroda  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Shigetoshi Sugawa  
5th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker
Date Time 2019-10-24 16:10:00 
Presentation Time 30 
Registration for SDM 
Paper # IEICE-SDM2019-67 
Volume (vol) IEICE-119 
Number (no) no.239 
Page pp.69-72 
#Pages IEICE-4 
Date of Issue IEICE-SDM-2019-10-16 


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