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Paper Abstract and Keywords
Presentation 2019-08-09 11:40
Dependence of noise equivalent power on NbN film thickness of spiral-MKIDs
Atsushi Saito, Daiki Oka, Yoshiki Kato, Daisuke Kurashina, Kaito Suzuki, Yusuke Nakada, Kensuke Nakajima (Yamagata Univ.) SCE2019-12
Abstract (in Japanese) (See Japanese page) 
(in English) We report on the design of spiral-MKIDs for THz wave real-time imaging and the fabrication and evaluation of 4K operation devices using NbN thin films. We fabricated spiral-MKIDs with different film thicknesses using deposition conditions for epitaxially grown NbN films on m-plane sapphire substrates, and experimentally clarified that the response characteristics of the electromagnetic wave and the unloaded Q values of the devices have a trade-off relationship with the NbN film thickness. In addition, the film thickness dependence of noise equivalent power (NEP) gave an optimum film thickness of 3 to 4 nm and NEP ~ 1.0×10-13 W/Hz1/2 @ 3.7 K.
Keyword (in Japanese) (See Japanese page) 
(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 164, SCE2019-12, pp. 21-26, Aug. 2019.
Paper # SCE2019-12 
Date of Issue 2019-08-02 (SCE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (No. 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SCE2019-12

Conference Information
Committee SCE  
Conference Date 2019-08-09 - 2019-08-09 
Place (in Japanese) (See Japanese page) 
Place (in English) National Institute of Advanced Industrial Science and Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Device, think film, etc. 
Paper Information
Registration To SCE 
Conference Code 2019-08-SCE 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Dependence of noise equivalent power on NbN film thickness of spiral-MKIDs 
Sub Title (in English)  
1st Author's Name Atsushi Saito  
1st Author's Affiliation Yamagata University (Yamagata Univ.)
2nd Author's Name Daiki Oka  
2nd Author's Affiliation Yamagata University (Yamagata Univ.)
3rd Author's Name Yoshiki Kato  
3rd Author's Affiliation Yamagata University (Yamagata Univ.)
4th Author's Name Daisuke Kurashina  
4th Author's Affiliation Yamagata University (Yamagata Univ.)
5th Author's Name Kaito Suzuki  
5th Author's Affiliation Yamagata University (Yamagata Univ.)
6th Author's Name Yusuke Nakada  
6th Author's Affiliation Yamagata University (Yamagata Univ.)
7th Author's Name Kensuke Nakajima  
7th Author's Affiliation Yamagata University (Yamagata Univ.)
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Date Time 2019-08-09 11:40:00 
Presentation Time 25 
Registration for SCE 
Paper # IEICE-SCE2019-12 
Volume (vol) IEICE-119 
Number (no) no.164 
Page pp.21-26 
#Pages IEICE-6 
Date of Issue IEICE-SCE-2019-08-02 

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